Spectral filter, and image sensor and electronic device including the spectral filter
AssigneeSamsung Electronics Co., Ltd.
InventorsHyochul KIM, Younggeun ROH, Jaesoong LEE
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Abstract
Provided are a spectral filter, and an image sensor and an electronic device including the spectral filter. The spectral filter includes: a first metal reflective layer; a second metal reflective layer provided above the first metal reflective layer; a plurality of cavities provided between the first and second metal reflective layers, the plurality of cavities including first patterns corresponding to different center wavelengths; and a plurality of lower pattern films provided below the first metal reflective layers, the plurality of lower pattern films including second patterns corresponding to the different center wavelengths.
Claims14
A spectral filter comprising:
- a first metal reflective layer;
- a second metal reflective layer provided above the first metal reflective layer;
- a plurality of cavities provided between the first metal reflective layer and the second metal reflective layer, the plurality of cavities comprising first patterns respectively corresponding to different center wavelengths;
- a plurality of lower pattern films provided below the first metal reflective layer, the plurality of lower pattern films comprising second patterns respectively corresponding to the different center wavelengths;
- and
- a broadband filter array provided above the second metal reflective layer and comprising a plurality of broadband filters, each of the plurality of broadband filters only transmitting light of a certain wavelength band.
An image sensor comprising:
- a pixel array comprising a plurality of pixels;
- and
- a spectral filter arranged in the pixel array,
- wherein the spectral filter comprises:
- a first metal reflective layer;
- a second metal reflective layer provided above the first metal reflective layer;
- a plurality of cavities provided between the first metal reflective layer and the second metal reflective layer, the plurality of cavities comprising first patterns respectively corresponding to different center wavelengths;
- a plurality of lower pattern films provided between the first metal reflective layer and the pixel array, the plurality of lower pattern films comprising second patterns corresponding to the different center wavelengths;
- and
- a broadband filter array provided above the second metal reflective layer and comprising a plurality of broadband filters, each of the plurality of broadband filters only transmitting light of a certain wavelength band.
Dependencies are inferred from the claim text.