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US 2025/0129503 A1Published application
Composition for copper electrodeposition comprising a polyaminoamide type leveling agent
AssigneeBASF SE
InventorsMarco ARNOLD, Alexander FLUEGEL, Elisabeth KUTTNER, Nadine ENGELHARDT
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Abstract
Described herein is a copper electroplating composition including copper ions, an acid, and at least one polyaminoamide including a group of formula L1 [B-A-B′—Z]n[Y—Z]m (L1) that is obtainable by reacting a diamine compound including two primary or secondary amino groups with an amino acid in a molar ratio of approx. 1:2 to form an aminoamide compound that is afterwards reacted with a coupling agent and optionally with a diamine co-monomer.
Claims19
A copper electroplating composition comprising copper ions, an acid, and at least one polyaminoamide comprising a group of formula L1
- [B-A-B′—Z]n[Y—Z]m (L1)
- wherein
- B, B′ are the same or different, and are amino acid fragments of formula L2a
- or of Formula L2b
- A is a diamine fragment independently selected from the group consisting of formula
- DL1 is a divalent group selected from the group consisting of
- (a) a C1-C20-alkanediyl which may optionally be substituted by an amino group or interrupted by a double bond or an imino group, and
- (b) an ether or polyether group of formula L2a
- -(DL10-O-]oDL10- (L2c)
- DL2 is a divalent group selected from a group consisting of
- (a) a linear, branched or cyclic C1 to C20 alkanediyl, which may optionally be interrupted by one ore more NRL10 or substituted by one or more, groups NRL10RL11 or ORL10,
- (b) -DL13-ArL13-DL13-;
- and
- (c) an ether or polyether group of formula L2c
- DL10 is selected from the group consisting of a linear or branched C1-C6-alkanediyl,
- DL13 is selected from the group consisting of a C1-C6-alkanediyl,
- ArL13 is a C6 to C10 aromatic moiety;
- DL11, DL12 are
- (a) independently selected from the group consisting of a linear or branched C1 to C6 alkanediyl, or
- (b) both, together with the adjacent two N atoms, part of a 5 or 6-membered aromatic heterocyclic ring system;
- DL21,DL22 are
- (a) independently selected from the group consisting of a linear or branched C1 to C6 alkanediyl, or
- (b) both, together with the adjacent two N atoms, part of a 5 or 6-membered aromatic heterocyclic ring system;
- DL23 is a C1 to C6 alkanediyl;
- RL1, RL2 are independently selected from the group consisting of a C1 to C6 alkyl;
- RL3 is selected from the group consisting of H and a C1 to C6 alkyl;
- XL2 is N or CRL3;
- Y is a co-monomer fragment;
- Z is a divalent coupling fragment of formula L4
- ZL1 is selected from the group consisting of
- (a) a linear or branched C1 to C12 alkanediyl, which may be interrupted by one or more O atoms, which may be interrupted by 1 or two O atoms, and
- (b) a divalent group -DL11-ArL11-DL11-;
- ZL2, ZL3 are independently selected from the group consisting of a chemical bond and hydroxyethanediyl;
- n is an integer of from 1 to 400;
- m is 0 or an integer of from 1 to 400;
- is an integer of from 1 to 100;
- and
- p, r are independently 0 or 1.
35 more elements
Dependencies are inferred from the claim text.