Transport device and transport method
AssigneeSumitomo Heavy Industries, Ltd.
InventorsKenichi OHTA, Taizo IWAYAGUCHI
Life of this patent
Estimating the term…
Abstract
A transport device for transporting a cryopump includes a bogie that includes a front wheel and a rear wheel, a mast that extends from a front side of the bogie in a height direction, a raising and lowering unit that is supported by the mast and that has a changeable height, a guide rail that extends forward from the raising and lowering unit, an arm that is supported by the guide rail and that is slidable in a front-rear direction, a cargo platform that is provided at a tip part of the arm and that holds the cryopump, and a counterweight that is provided on a rear side of the bogie.
Claims9
A transport device for transporting a cryopump, the transport device comprising:
- a bogie that includes a front wheel and a rear wheel;
- a mast that extends from a front side of the bogie in a height direction;
- a raising and lowering unit that is supported by the mast and that has a changeable height;
- a guide rail that extends forward from the raising and lowering unit;
- an arm that is supported by the guide rail and that is slidable in a front-rear direction;
- a cargo platform that is provided at a tip part of the arm and that holds the cryopump;
- and
- a counterweight that is provided on a rear side of the bogie.
Dependencies are inferred from the claim text.