Euv collector for an euv projection exposure apparatus

An EUV collector configured to transfer usable EUV light emerging from a source volume into a collection volume which is separated from the source volume, wherein:

• the source volume has a first extension along a connection axis between a center of the source volume and a center of the collection volume;
• the source volume has a second extension along a cross section axis perpendicular to the connection axis;
• the EUV collector is configured to image the source volume into the collection volume so that the imaging has a first imaging scale along the connection axis and a second imaging scale along the cross section axis;
• the first imaging scale differs from the second imaging scale by at least 10%;
• the first imaging scale is smaller than the second imaging scale so that a collection volume aspect ratio of the collection volume is less than a source volume aspect ratio of the source volume;
• the collection volume aspect ratio of the collection volume is a ratio of an extension of the collection volume along the connection axis to an extension of the collection volume along the cross section axis;
• and
• the source volume aspect ratio of the source volume is a ratio of an extension of the source volume along the connection axis to an extension of the source volume along the cross section axis.