Probe card and inspection system
AssigneeKabushiki Kaisha Nihon Micronics
InventorsHisao NARITA, Hideki HIROTA, Shogo SHIMOZAWA
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Abstract
A probe card includes a probe guide for holding a probe and a probe substrate stacked on the probe guide. The probe substrate has a first surface facing a tester head and a second surface facing the probe guide, and a through hole passing through from the first surface to the second surface is disposed therein. The probe guide abuts the probe substrate due to an inside of the through hole being evacuated while the probe substrate abuts the tester head by means of vacuum adsorption.
Claims7
A probe card to which a probe for contacting an object to be inspected is attached and which is connected to a tester head by means of vacuum adsorption, the probe card comprising:
- a probe guide for holding the probe;
- and
- a probe substrate which is stacked on the probe guide and has a first surface facing the tester head and a second surface facing the probe guide, and in which a through hole passing through from the first surface to the second surface is disposed, wherein
- the probe guide abuts the probe substrate due to an inside of the through hole being evacuated while the probe substrate abuts the tester head by means of the vacuum adsorption.
Dependencies are inferred from the claim text.