Micro-electromechanical systems switch with beam movement orthogonal to force
AssigneeRaytheon Company
InventorBahram Ghodsian
Life of this patent
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Abstract
A micro-electromechanical systems (MEMS) switch and method of fabricating the same including at least one comb drive having a first input and a second input, at least one conductive beam connected across the at least one comb drive, a first contact, and a second contact, wherein no voltage difference between the first input and the second input does not result in any movement of the MEMS switch, and wherein a voltage difference between the first input and the second input causes an electrostatic force to be generated that causes the at least one conductive beam to move in a direction orthogonal to a direction of the electrostatic force.
Claims20
A micro-electromechanical systems (MEMS) switch, comprising:
- at least one comb drive having a first input and a second input,
- at least one conductive beam connected across the at least one comb drive;
- a first contact;
- and
- a second contact,
- wherein no voltage difference between the first input and the second input does not result in any movement of the MEMS switch, and
- wherein a voltage difference between the first input and the second input causes an electrostatic force to be generated that causes the at least one conductive beam to move in a direction orthogonal to a direction of the electrostatic force.
A method of fabricating a micro-electromechanical systems (MEMS) switch, comprising:
- acquiring a first substrate and a second substrate;
- forming a MEMS switch on the first substrate with an amplification flexible conductive beam that moves in a direction orthogonal to a direction of electrostatic force that moves the amplification flexible conductive beam;
- and
- attaching the second substrate to the MEMS switch.
Dependencies are inferred from the claim text.