Optical modulator and electronic apparatus including the same
AssigneesSamsung Electronics Co., Ltd., The Board of Trustees of the Leland Stanford Junior University
InventorsNicholas Güsken, Junghwan Song, Mark Brongersma, Minkyung Lee, Junghyun Park
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Abstract
Provided is an optical modulator including a substrate, and a plurality of unit structures periodically on the substrate, one of the plurality of unit structures including a heater layer on a first surface of the substrate, an antenna on a first surface of the heater layer, the antenna including a phase change material, a passivation layer on the substrate, the heater layer, and the antenna, and a reflector on a second surface of the substrate opposite to the first surface of the substrate.
Claims20
An optical modulator comprising:
- a substrate;
- and
- a plurality of unit structures periodically on the substrate, wherein one of the plurality of unit structures comprises:
- a heater layer on a first surface of the substrate;
- an antenna on a first surface of the heater layer, the antenna comprising a phase change material;
- a passivation layer on the substrate, the heater layer, and the antenna;
- and
- a reflector on a second surface of the substrate opposite to the first surface of the substrate.
An electronic apparatus comprising:
- an optical modulator comprising:
- a substrate;
- and
- a plurality of unit structures periodically on the substrate, wherein one the plurality of unit structures comprises:
- a heater layer on a first surface of the substrate;
- an antenna on a first surface of the heater layer, the antenna comprising a phase change material;
- a passivation layer on the substrate, the heater layer, and the antenna;
- and
- a reflector on a second surface of the substrate opposite to the first surface of the substrate.
A beam steering apparatus comprising:
- a light source configured to emit a laser beam;
- an optical modulator configured to steer the laser beam incident from the light source;
- and
- a detector configured to detect the steered laser beam,
- wherein the optical modulator comprises:
- a substrate;
- and
- a plurality of unit structures periodically on the substrate, wherein one of the plurality of unit structures comprises:
- a heater layer on a first surface of the substrate;
- an antenna on a first surface of the heater layer, the antenna comprising a phase change material;
- a passivation layer on the substrate, the heater layer, and the antenna;
- and
- a reflector on a second surface of the substrate opposite to the first surface.
Dependencies are inferred from the claim text.