Method of assessing a sample, apparatus for assessing a sample
AssigneeASML Netherlands B.V.
InventorMarco Jan-Jaco WIELAND
Life of this patent
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Abstract
The present disclosure relates to apparatus and methods for assessing samples using charged particles. In one arrangement, a degassing action is performed by exposing a target area of a sample with charged particles to stimulate degassing. A rate of degassing from the target area is measured during the degassing action. Initiation of an assessing of the sample is controlled based on a characteristic of the measured rate of degassing. The assessing of the sample comprising exposing the target area with charged particles and detecting signal charged particles from the target area.
Claims15
A method of assessing a sample using charged particles, comprising:
- performing a degassing action by exposing a target area of a sample with charged particles to stimulate degassing;
- measuring a rate of degassing from the target area during the degassing action;
- and
- controlling initiation of an assessing of the sample based on a characteristic of the measured rate of degassing, the assessing of the sample comprising exposing the target area with charged particles and detecting signal charged particles from the target area.
Dependencies are inferred from the claim text.