Method of calculating optical aerial image

Abstract

A method for calculating optical aerial images. The method includes following steps. A first pattern distribution in a spatial domain is multiplied by a scaling constant to scale the first pattern distribution to generate a second pattern distribution. A fast Fourier transform is performed on the second pattern distribution to generate a first spatial frequency spectrum distribution in a spatial frequency domain. The first spatial frequency spectrum distribution is multiplied by a pupil function to generate a second spatial frequency spectrum distribution. An inverse fast Fourier transform is performed on the second spatial frequency spectrum distribution to generate a first diffraction image distribution in the spatial domain. The first diffraction image distribution is divided by a scaling constant to scale the first diffraction image distribution to generate a second diffraction image distribution.

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