Hafnium compound-containing sol-gel liquid and hafnia-containing film
AssigneeMitsubishi Materials Corporation
InventorNaoto Tsujiuchi
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Abstract
A hafnium compound-containing sol-gel liquid contains an alcohol as a solvent and a hafnium compound as a hafnia source, in which the hafnium compound-containing sol-gel liquid contains one or two or more elements M selected from the group consisting of Zr, Ti, and Nb, a mass ratio WM/WHf of a content WM of the elements M to a content WHf of Hf as a metal component is within a range of 0.2% or more and 5.0% or less. A hafnia-containing film containing hafnia (HfO2) and one or two or more elements M selected from the group consisting of Zr, Ti, and Nb, and in which a mass ratio WM/WHfO2 of a content WM of the elements M to a content WHfO2 of the HfO2 is within a range of 0.05% or more and 5.0% or less.
Claims7
A hafnium compound-containing sol-gel liquid comprising:
- an alcohol as a solvent;
- and
- a hafnium compound as a hafnia source,
- wherein the hafnium compound-containing sol-gel liquid contains one or two or more elements M selected from a group consisting of Zr, Ti, and Nb,
- a mass ratio WM/WHf of a content WM of the elements M to a content WHf of Hf as a metal component is within a range of 0.2% or more and 5.0% or less.
A hafnia-containing film comprising:
- hafnia (HfO2);
- and
- one or two or more elements M selected from a group consisting of Zr, Ti, and Nb,
- wherein a mass ratio WM/WHfO2 of a content WM of the elements M to a content WHfO2 of the HfO2 is within a range of 0.05% or more and 5.0% or less.
Dependencies are inferred from the claim text.