Laser oscillator
AssigneeVia Mechanics, Ltd.
InventorsKazuya MATSUMOTO, Nobuyoshi OHTANI
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AssigneeVia Mechanics, Ltd.
InventorsKazuya MATSUMOTO, Nobuyoshi OHTANI
Estimating the term…
A laser oscillator includes an outer electrode, an inner electrode forming a discharge chamber between the inner electrode and the outer electrode, a first resonator mirror provided on a first end side of the outer electrode and the inner electrode, a second resonator mirror provided on a second end side of the outer electrode and the inner electrode and configured to reflect the laser light between the second resonator mirror and the first resonator mirror, and a support member configured to support the inner electrode. The support member has an opening portion through which the laser light passes at a position corresponding to the discharge chamber, and at least a part of the opening portion has an opening width smaller than a beam diameter of the laser light emitted from the discharge chamber and serves as a space filter portion.
A laser oscillator comprising:
Dependencies are inferred from the claim text.