Photosensitive composition containing pfas-free polycycloolefinic terpolymers and semiconductor device made thereof

A photosensitive composition comprising:

• a) a polymer having a first repeating unit of formula (IA) derived from a monomer of formula (I):
• a second repeating unit of formula (IIA) derived from a monomer of formula (II):
• and a third repeating unit of formula (IIIA) derived from a monomer of formula (III):
• wherein:
• represents a position at which the bonding takes place with another repeat unit;
• a is an integer from 0 to 3;
• b is an integer from 1 to 4;
• c is an integer from 1 to 4;
• d is an integer from 1 to 4;
• Y is a bond or CH2;
• R1 is selected from the group consisting of hydrogen, methyl, ethyl, n-propyl, i-propyl and n-butyl;
• each R18 is independently selected from the group consisting of hydroxy, methoxy and acetoxy;
• R19 is-(CH2)v—CO2R20 where v is an integer from 0 to 4, and
• R20 is hydrogen or (C1-C4)alkyl;
• b) a photo active compound containing a diazo-quinone moiety of formula (A):
• c) a multifunctional crosslinking agent selected from the group consisting of:
• a compound of formula (IV):
• and a compound of formula (V):
• wherein:
• n is an integer from 3 to 8;
• A is selected from the group consisting of C, CH—(CR2)d—CH and substituted or unsubstituted aryl, where d is an integer from 0 to 4 and R is selected from the group consisting of hydrogen, methyl, ethyl, n-propyl, i-propyl and n-butyl;
• B is selected from the group consisting of substituted or unsubstituted (C1-C6)alkyl, (C2-C6)alkylene and substituted or unsubstituted aryl;
• wherein said substituents are selected from the group consisting of halogen, methyl, ethyl, linear or branched (C3-C6)alkyl, (C3-C8) cycloalkyl, (C6-C10) aryl, (C7-C12) aralkyl, methoxy, ethoxy, linear or branched (C3-C6)alkyloxy, (C3-C8) cycloalkyloxy, (C6-C10) aryloxy and (C7-C12) aralkyloxy;
• d) a phenolic compound selected from the group consisting of: