Large format reticle container
AssigneeEntegris, Inc.
InventorsHuaping Wang, Anthony M. Tieben, Russ V. Raschke, Brian Wiseman, Tyler Monforton
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AssigneeEntegris, Inc.
InventorsHuaping Wang, Anthony M. Tieben, Russ V. Raschke, Brian Wiseman, Tyler Monforton
Estimating the term…
A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.
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A substrate container, comprising:
A substrate container, comprising:
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A substrate container, comprising:
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Dependencies are inferred from the claim text.