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US 2025/0105593 A1Published application
Vertical-cavity surface-emitting laser with a regulated dominant polarization state
AssigneeLumentum Operations LLC
InventorsRicha DUBEY, Yu ZHANG
Life of this patent
Estimating the term…
Abstract
A vertical-cavity surface-emitting laser (VCSEL) may include a distributed Bragg reflector (DBR) stack. The DBR stack may include a mirror structure over a cavity region. The DBR stack may include an etch stop layer over the mirror structure. The DBR stack may include a grating layer over the etch stop layer. The grating layer may include a grating structure associated with polarization of output light emitted by the VCSEL.
Claims20
A vertical-cavity surface-emitting laser (VCSEL), comprising:
- a distributed Bragg reflector (DBR) stack, comprising:
- a mirror structure over a cavity region;
- an etch stop layer over the mirror structure;
- and
- a grating layer over the etch stop layer, the grating layer including a grating structure associated with polarization of output light emitted by the VCSEL.
2 more elements
A vertical-cavity surface-emitting laser (VCSEL), comprising:
- a distributed Bragg reflector (DBR) stack, comprising:
- an etch stop layer associated with controlling etching of a grating layer during formation of a grating structure in the grating layer,
- wherein the grating structure is associated with providing polarization selectivity for the VCSEL, and
- wherein the control of the etching provided by the etch stop layer increases polarization stability of the VCSEL and improves performance and uniformity of the performance of the VCSEL;
- and
- the grating layer including the grating structure.
3 more elements
A vertical-cavity surface-emitting laser (VCSEL), comprising:
- a distributed Bragg reflector (DBR) stack, comprising:
- a grating layer;
- and
- an etch stop layer to control an etch depth of the grating layer, wherein the control of the etch depth of the grating layer is associated with regulation of a dominant polarization state of light emitted by the VCSEL.
1 more element
Dependencies are inferred from the claim text.