Resist composition, resist pattern formation method, and compound

A compound represented by General Formula (a0-1′) or General Formula (a0-2),

• wherein R01 represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or a halogenated alkyl group having 1 to 10 carbon atoms, L001 represents a single bond or a divalent linking group represented by any of General Formulae (L00-r-1) to (L00-r-5), Ar01 represents an aryl group in which some or all hydrogen atoms are substituted with iodine atoms or a heteroaryl group in which some or all hydrogen atoms are substituted with iodine atoms, where the aryl group and the heteroaryl group may have a substituent other than the iodine atoms, Xa01 represents a group which forms an alicyclic hydrocarbon group together with a carbon atom to which Ar01 is bonded, and some or all hydrogen atoms of the alicyclic hydrocarbon group may be substituted with substituents, and some carbon atoms forming a ring may be substituted with heteroatoms, and
• in Formula (a0-2), R02 represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or a halogenated alkyl group having 1 to 10 carbon atoms, L02 represents a single bond or a divalent linking group, Ar02 represents an aryl group in which some or all hydrogen atoms are substituted with iodine atoms or a heteroaryl group in which some or all hydrogen atoms are substituted with iodine atoms, where the aryl group and the heteroaryl group may have a substituent other than the iodine atoms, Ra02 represents a hydrocarbon group which may have a substituent, or a hydrogen atom, Xa02 represents a group which forms an alicyclic hydrocarbon group together with a carbon atom to which Ra02 is bonded and a group which is bonded to Ar02 to form a condensed ring, and some or all hydrogen atoms of the alicyclic hydrocarbon group may be substituted with substituents, and some carbon atoms forming a ring may be substituted with heteroatoms,
• wherein Rx00 represents an alkylene group, Ar′00 represents an arylene group having a substituent, Lc00 represents a lactone-containing cyclic group represented by any one of General Formulae (L-r-1) to (L-r-7), * represents a bonding site with respect to a carbon atom to which R01 in General Formula (a0-1′) is bonded, and ** represents a bonding site with respect to a carbon atom of a carbonyl group in General Formula (a0-1′),
• wherein each Ra′021 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR0″, —OC(═O)R0″, a hydroxyalkyl group, or a cyano group, R0″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group, A0″ represents an alkylene group having 1 to 5 carbon atoms which may have an oxygen atom (—O—) or a sulfur atom (—S—), an oxygen atom, or a sulfur atom, n0′ represents an integer of 0 to 2, and m0′ represents 0 or 1, * represents a bonding site with respect to a carbon atom of a carbonyl group in General Formula (L00-r-5), and ** represents a bonding site with respect to a carbon atom of a carbonyl group in General Formula (a0-1).

A compound represented by General Formula (a0-1-1) or General Formula (a0-2-1),

• wherein in Formula (a0-1-1), R01 represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or a halogenated alkyl group having 1 to 10 carbon atoms, L01 represents a single bond or a divalent linking group, Ar001 represents a heteroaryl group in which some or all hydrogen atoms are substituted with iodine atoms, where the heteroaryl group may have a substituent other than the iodine atoms, Xa01 represents a group which forms an alicyclic hydrocarbon group together with a carbon atom to which Ar001 is bonded, and some or all hydrogen atoms of the alicyclic hydrocarbon group may be substituted with substituents, and some carbon atoms forming a ring may be substituted with heteroatoms, and
• in Formula (a0-2-1), R02 represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or a halogenated alkyl group having 1 to 10 carbon atoms, L02 represents a single bond or a divalent linking group, Ar002 represents a heteroaryl group in which some or all hydrogen atoms are substituted with iodine atoms, the heteroaryl group may have a substituent other than the iodine atoms, Ra02 represents a hydrocarbon group which may have a substituent, or a hydrogen atom, Xa02 represents a group which forms an alicyclic hydrocarbon group together with a carbon atom to which Ra02 is bonded and a group which is bonded to Ar002 to form a condensed ring, and some or all hydrogen atoms of the alicyclic hydrocarbon group may be substituted with substituents, and some carbon atoms forming a ring may be substituted with heteroatoms.