Light beam characterization system
AssigneeLeica Microsystems CMS GmbH
InventorNicolas CAMUS
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AssigneeLeica Microsystems CMS GmbH
InventorNicolas CAMUS
Estimating the term…
A system for characterizing a light beam includes a detector that includes at least one detector unit, and a micro-opto-electromechanical system that includes an array of mirrors. Each mirror is switchable between a first sand a second witching states. In the first switching state, the mirror reflects light emitted by a light source onto the detector. In the second switching state, the mirror reflects the light away from the detector. The system further includes a controller configured to cause a beam profile measurement to be performed on the light detected by the detector unit while selectively switching the mirrors between the first and the second switching states, and an optical unit configured to direct the light in a form of two different input light beams onto the micro-opto-electromechanical system. The controller is configured to cause the beam profile measurement to be performed on each of the two input light beams.
A light beam characterization system for characterizing a light beam emitted by a light source, the light beam characterization system comprising:
A method for light beam characterization, the method comprising:
Dependencies are inferred from the claim text.