Device and Method for Detecting and Removing Contaminants on a Mould for Encapsulating Electronic Components
AssigneeBesi Netherlands B.V.
InventorsAlbertus Franciscus Gerardus van Driel, Henricus Antonius Maria Fierkens
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Abstract
The invention relates to a cleaning device for detecting and removing contaminants on a mould for encapsulating electronic components, especially semiconductors, including a light source for irradiating a mould surface; an optical detector for detecting irradiated contaminants on the mould surface; a moveable cleaner for removing the contaminants; and a controller for the cleaner. The invention also relates to a cleaning method for such a mould.
Claims20
A cleaning device for detecting and removing contaminants on a mould for encapsulating electronic components, especially semiconductors, comprising:
- at least one light source for irradiating a mould surface with at least one light beam;
- at least one optical detector for detecting the location of at least one irradiated contaminant on the mould surface;
- a relative moveable cleaner for removing contaminants from the mould surface;
- and
- a controller for driving the relative moveable cleaner to the detected location.
The cleaning method for detecting and removing contaminants on a mould for encapsulating electronic components, especially semiconductors, comprising the method steps:
- A) irradiating a mould surface of a mould for encapsulating electronic components with at least one light beam;
- B) detecting the locations of irradiated contaminants on the mould surface;
- and
- C) steering a relative moveable cleaner to remove the detected contaminants.
Dependencies are inferred from the claim text.