Optical semiconductor device
AssigneeNeoPhotonics Corporation
InventorTakanori KOJIMA
Life of this patent
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Abstract
Provided is an optical semiconductor device in which electrodes have excellent connectivity and a device size is kept from increasing. In a first direction, a first bank portion, a first groove portion, a third bank portion, a third groove portion, an optical function portion, and a second bank portion are placed in this order. A distance between an upper end and a lower end of a first bank portion-side side surface in the first direction is longer than a distance between an upper end and a lower end of a third bank portion-side side surface in the first direction. The first electrode is in contact with the semiconductor layer of the first conductivity type in a bottom portion of the first groove portion, and stretches along the first bank portion-side side surface to a top surface of the first bank portion.
Claims20
An optical semiconductor device, comprising:
- a semiconductor layer of a first conductivity type;
- an optical function layer placed above the semiconductor layer of the first conductivity type;
- a semiconductor layer of a second conductivity type placed above the optical function layer;
- a first electrode electrically connected to the semiconductor layer of the first conductivity type;
- a second electrode electrically connected to the semiconductor layer of the second conductivity type;
- a first bank portion in which a part of the first electrode is placed;
- a first groove portion adjacent to the first bank portion;
- a second bank portion in which a part of the second electrode is placed;
- a third bank portion;
- a third groove portion adjacent to the third bank portion;
- and
- an optical function portion including the optical function layer,
- wherein, in a second direction that is, in plan view, perpendicular to a first direction along which the optical function portion stretches, the first bank portion, the first groove portion, the third bank portion, the third groove portion, the optical function portion, and the second bank portion are placed in the stated order,
- wherein the second electrode is in contact with the semiconductor layer of the second conductivity type in the optical function portion,
- wherein a first bank portion-side side surface, which is a side surface of the first groove portion on the first bank portion side, has a stepped shape including a terrace portion,
- wherein a distance between an upper end and a lower end of the first bank portion-side side surface in the second direction is longer than a distance between an upper end and a lower end of a third bank portion-side side surface, which is a side surface of the first groove portion on the third bank portion side, in the second direction, and
- wherein the first electrode is in contact with the semiconductor layer of the first conductivity type in a bottom portion of the first groove portion, and stretches along the first bank portion-side side surface to a top surface of the first bank portion.
Dependencies are inferred from the claim text.