# US 2025/0096031 A1 · Substrate treatment apparatus having heating part

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- Number: US 2025/0096031 A1
- Document ID: US20250096031A1
- Status: Published application
- Kind: A1
- Application number: 18/424,117
- Filed: 2024-01-26
- Published: 2025-03-20
- Earliest claimed: 2023-09-15
- Assignees: Deviceeng Co., Ltd.
- Applicants: Deviceeng Co., Ltd.
- Inventors: Taek Youb Lee; Hee Won Lee
- Web page: https://patentgrep.com/patent/US20250096031A1

## CPC

- H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers}
- H05B 3/16: the conductor being mounted on an insulating base
- H10P 72/0434: {mainly by convection}
- H10P 72/0414: {using mainly spraying means, e.g. nozzles}
- H10P 72/0432: {mainly by conduction}
- H10P 72/70: for supporting or gripping
- H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL

## Abstract

The present disclosure relates to a substrate treatment apparatus including: a chuck base having a ring-shaped spin chuck with chuck pins disposed on top thereof to support a substrate and a chuck support part located on the lower portion of the inner peripheral surface of the spin chuck; a back nozzle assembly mounted through a hollow portion formed at the center of the chuck base to spray treatment liquid onto the underside of the substrate; cover glass disposed between top of the spin chuck and the back nozzle assembly; and a heating part located inside the inner peripheral surface of the spin chuck in a space between the cover glass and the chuck support part, wherein the spin chuck is separably coupled to the chuck support part in an up-down direction.

## Claims

### Claim 1

A substrate treatment apparatus having a heating part, comprising:
a chuck base having a ring-shaped spin chuck with chuck pins disposed on top thereof to support a substrate and a chuck support part located on the lower portion of the inner peripheral surface of the spin chuck;
a back nozzle assembly mounted through a hollow portion formed at the center of the chuck base to spray treatment liquid onto the underside of the substrate;
cover glass disposed between top of the spin chuck and the back nozzle assembly; and
the heating part located inside the inner peripheral surface of the spin chuck in a space between the cover glass and the chuck support part,
wherein the spin chuck is separably coupled to the chuck support part in an up-down direction.

### Claim 2 (depends on 1)

The substrate treatment apparatus according to claim 1, wherein the chuck support part has a plurality of locking groove supports spaced apart from one another along the outer peripheral surface thereof, and the spin chuck has a plurality of locking protrusions protruding from the inner peripheral surface thereof in such a way as to be separably lockedly inserted into the locking groove supports in the up-down direction by means of fastening members.

### Claim 3 (depends on 2)

The substrate treatment apparatus according to claim 2, wherein each locking groove support is formed by that a groove is concavely formed toward the inside from the outer peripheral surface of the top of the chuck support part and extended in a thickness direction of the chuck support part to make a shelf part formed on the bottom, and the locking protrusions have complementary side peripheral surfaces to the locking groove supports.

### Claim 4 (depends on 2)

The substrate treatment apparatus according to claim 2, wherein tops of the locking protrusions are located on the same plane as tops of the chuck support part in a state where the locking protrusions and the locking groove supports are coupled to one another, and the fastening members are prevented from being exposed protrudingly to the outside from top of the locking protrusions.

### Claim 5 (depends on 2)

The substrate treatment apparatus according to claim 2, wherein the outer peripheral surface of the heating part has the shape corresponding to the inner peripheral surface of the spin chuck, and the heating part has a plurality of first grooves formed along the outer peripheral surface thereof to pass the locking protrusions therethrough.

### Claim 6 (depends on 2)

The substrate treatment apparatus according to claim 2, further comprising a heat sink located to come into contact with the underside of the heating part in such a way as to allow the outer peripheral surface of the heat sink to have the shape corresponding to the outer peripheral surface of the heating part and having a plurality of second grooves formed along the outer peripheral surface of the heat sink to pass the locking protrusions therethrough.

### Claim 7 (depends on 2)

The substrate treatment apparatus according to claim 2, wherein the fastening members are fixing bolts passing through the locking protrusions in up-down directions in such a way as to be fastened to the bottoms of the locking groove supports.