# US 2025/0096019 A1 · Substrate processing systems and methods using virtual machine architecture for operating substrate processing chambers

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2025/0096019 A1
- Document ID: US20250096019A1
- Status: Published application
- Kind: A1
- Application number: 18/884,434
- Filed: 2024-09-13
- Published: 2025-03-20
- Earliest claimed: 2023-09-15
- Assignees: ASM IP Holding B.V.
- Applicants: ASM IP Holding B.V.
- Inventors: Eric Steinseifer
- Web page: https://patentgrep.com/patent/US20250096019A1

## CPC

- H10P 72/0454: {surrounding a central transfer chamber}
- G05B 19/4189: {characterised by the transport system}
- H10P 72/0461: {characterised by the presence of two or more transfer chambers}
- H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput}
- H10P 72/3304: {characterised by movements or sequence of movements of transfer devices}
- H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance}
- G05B 2219/39001: Robot, manipulator control
- G05B 2219/45031: Manufacturing semiconductor wafers
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)

## Abstract

Substrate processing systems and methods include functions of the substrate processing chambers virtually controlled by process module software for the individual substrate processing chambers operating on a remote platform computer (e.g., located with the equipment front end module or load-lock module). The platform computer includes memory storing process module software for each of the associated substrate processing chambers and transmits signals for operating those substrate processing chambers based on data generated by the respective process module software for that substrate processing chamber. The platform computer also receives data transmitted from the substrate processing chambers (e.g., sensor data) that may be used by their respective process module software for generating further operating signals for controlling the respective substrate processing chamber. Avoiding the use and/or inclusion of separate computers in and associated with each individual substrate processing chamber can simplify maintenance and repair, reduce costs, reduce downtime, and improve efficiency.

## Claims

### Claim 1

A substrate processing system, comprising:
a first substrate handling chamber including a first robotic arm;
a first substrate processing chamber coupled with the first substrate handling chamber via a first gate valve, wherein a portion of the first robotic arm is configured to extend through the first gate valve and into the first substrate processing chamber to move substrates into and out of the first substrate processing chamber;
a second substrate processing chamber coupled with the first substrate handling chamber via a second gate valve, wherein the portion of the first robotic arm is configured to extend through the second gate valve and into the second substrate processing chamber to move substrates into and out of the second substrate processing chamber; and
a platform computer located remote from and in electronic communication with the first substrate processing chamber and the second substrate processing chamber, the platform computer: (a) including memory storing first process module software for operating the first substrate processing chamber and second process module software for operating the second substrate processing chamber, (b) transmitting signals for operating the first substrate processing chamber based on data generated by the first process module software, and (c) transmitting signals for operating the second substrate processing chamber based on data generated by the second process module software.

### Claim 2 (depends on 1)

The substrate processing system according to claim 1, further comprising:
a third substrate processing chamber coupled with the first substrate handling chamber via a third gate valve, wherein the portion of the first robotic arm is configured to extend through the third gate valve and into the third substrate processing chamber to move substrates into and out of the third substrate processing chamber, wherein the platform computer is located remote from and in electronic communication with the third substrate processing chamber, wherein the memory of the platform computer further stores third process module software for operating the third substrate processing chamber, and wherein the platform computer further transmits signals for operating the third substrate processing chamber based on data generated by the third process module software.

### Claim 3 (depends on 2)

The substrate processing system according to claim 2, further comprising:
a fourth substrate processing chamber coupled with the first substrate handling chamber via a fourth gate valve, wherein the portion of the first robotic arm is configured to extend through the fourth gate valve and into the fourth substrate processing chamber to move substrates into and out of the fourth substrate processing chamber, wherein the platform computer is located remote from and in electronic communication with the fourth substrate processing chamber, wherein the memory of the platform computer further stores fourth process module software for operating the fourth substrate processing chamber, and wherein the platform computer further transmits signals for operating the fourth substrate processing chamber based on data generated by the fourth process module software.

### Claim 4 (depends on 3)

The substrate processing system according to claim 3, further comprising:
a second substrate handling chamber including a second robotic arm; and
a fifth substrate processing chamber coupled with the second substrate handling chamber via a fifth gate valve, wherein a portion of the second robotic arm is configured to extend through the fifth gate valve and into the fifth substrate processing chamber to move substrates into and out of the fifth substrate processing chamber, wherein the platform computer is located remote from and in electronic communication with the fifth substrate processing chamber, wherein the memory of the platform computer further stores fifth process module software for operating the fifth substrate processing chamber, and wherein the platform computer further transmits signals for operating the fifth substrate processing chamber based on data generated by the fifth process module software.

### Claim 5 (depends on 4)

The substrate processing system according to claim 4, further comprising:
a sixth substrate processing chamber coupled with the second substrate handling chamber via a sixth gate valve, wherein the portion of the second robotic arm is configured to extend through the sixth gate valve and into the sixth substrate processing chamber to move substrates into and out of the sixth substrate processing chamber, wherein the platform computer is located remote from and in electronic communication with the sixth substrate processing chamber, wherein the memory of the platform computer further stores sixth process module software for operating the sixth substrate processing chamber, and wherein the platform computer further transmits signals for operating the sixth substrate processing chamber based on data generated by the sixth process module software.

### Claim 6 (depends on 4)

The substrate processing system according to claim 4, further comprising:
a load lock module connecting the first substrate handling chamber and the second substrate handling chamber, wherein the load lock module is configured to hold substrates moving between the first substrate handling chamber and the second substrate handling chamber.

### Claim 7 (depends on 1)

The substrate processing system according to claim 1, further comprising:
a second substrate handling chamber including a second robotic arm; and
a third substrate processing chamber coupled with the second substrate handling chamber via a third gate valve, wherein a portion of the second robotic arm is configured to extend through the third gate valve and into the third substrate processing chamber to move substrates into and out of the third substrate processing chamber, wherein the platform computer is located remote from and in electronic communication with the third substrate processing chamber, wherein the memory of the platform computer further stores third process module software for operating the third substrate processing chamber, and wherein the platform computer further transmits signals for operating the third substrate processing chamber based on data generated by the third process module software.

### Claim 8 (depends on 7)

The substrate processing system according to claim 7, further comprising:
a load lock module connecting the first substrate handling chamber and the second substrate handling chamber, wherein the load lock module is configured to hold substrates moving between the first substrate handling chamber and the second substrate handling chamber.

### Claim 9

A substrate processing system, comprising:
a first substrate handling chamber including a first robotic arm;
a first substrate processing chamber coupled with the first substrate handling chamber via a first gate valve, wherein a portion of the first robotic arm is configured to extend through the first gate valve and into the first substrate processing chamber to move substrates into and out of the first substrate processing chamber;
a second substrate processing chamber coupled with the first substrate handling chamber via a second gate valve, wherein the portion of the first robotic arm is configured to extend through the second gate valve and into the second substrate processing chamber to move substrates into and out of the second substrate processing chamber;
a front end module configured to receive unprocessed substrates for processing and to hold processed substrates prior to removal from the substrate processing system;
a first load lock module connecting the front end module and the first substrate handling chamber, wherein the first load lock module is configured to hold substrates moving between the front end module and the first substrate handling chamber; and
a platform computer provided with the front end module or the first load lock module, the platform computer being located remote from and in electronic communication with the first substrate processing chamber and the second substrate processing chamber, the platform computer: (a) including memory storing first process module software for operating the first substrate processing chamber and second process module software for operating the second substrate processing chamber, (b) transmitting signals for operating the first substrate processing chamber based on data generated by the first process module software, and (c) transmitting signals for operating the second substrate processing chamber based on data generated by the second process module software.

### Claim 10 (depends on 9)

The substrate processing system according to claim 9, further comprising:
a second substrate handling chamber including a second robotic arm;
a second load lock module connecting the first substrate handling chamber and the second substrate handling chamber, wherein the second load lock module is configured to hold substrates moving between the first substrate handling chamber and the second substrate handling chamber; and
a third substrate processing chamber coupled with the second substrate handling chamber via a third gate valve, wherein a portion of the second robotic arm is configured to extend through the third gate valve and into the third substrate processing chamber to move substrates into and out of the third substrate processing chamber, wherein the platform computer is located remote from and in electronic communication with the third substrate processing chamber, wherein the memory of the platform computer further stores third process module software for operating the third substrate processing chamber, and wherein the platform computer further transmits signals for operating the third substrate processing chamber based on data generated by the third process module software.

### Claim 11 (depends on 9)

The substrate processing system according to claim 9, further comprising:
a second substrate handling chamber including a second robotic arm;
a second load lock module connecting the first substrate handling chamber and the second substrate handling chamber, wherein the second load lock module is configured to hold substrates moving between the first substrate handling chamber and the second substrate handling chamber; and
a plurality of additional substrate processing chambers coupled with the second substrate handling chamber, wherein a portion of the second robotic arm is configured to extend into the plurality of additional substrate processing chambers to move substrates into and out of the plurality of additional substrate processing chambers, wherein the platform computer is located remote from and in electronic communication with the plurality of additional substrate processing chambers, wherein the memory of the platform computer further stores process module software for operating each of the plurality of additional substrate processing chambers, and wherein the platform computer further transmits signals for operating the plurality of additional substrate processing chambers based on data generated by the process module software for the plurality of additional substrate processing chambers.

### Claim 12 (depends on 9)

The substrate processing system according to claim 9, further comprising:
a second substrate handling chamber including a second robotic arm;
a second load lock module connecting the first substrate handling chamber and the second substrate handling chamber, wherein the second load lock module is configured to hold substrates moving between the first substrate handling chamber and the second substrate handling chamber; and
a plurality of additional substrate processing chambers coupled with the second substrate handling chamber, wherein a portion of the second robotic arm is configured to extend into the plurality of additional substrate processing chambers to move substrates into and out of the plurality of additional substrate processing chambers, wherein the platform computer is located remote from and in electronic communication with the plurality of additional substrate processing chambers, wherein the memory of the platform computer further stores separate process module software for operating each of the plurality of additional substrate processing chambers, and wherein the platform computer further transmits signals for operating the plurality of additional substrate processing chambers based on data generated by the process module software for the respective plurality of additional substrate processing chambers.

### Claim 13 (depends on 9)

The substrate processing system according to claim 9, further comprising:
a plurality of additional substrate processing chambers coupled with the first substrate handling chamber, wherein the portion of the first robotic arm is configured to extend into the plurality of additional substrate processing chambers to move substrates into and out of the plurality of additional substrate processing chambers, wherein the platform computer is located remote from and in electronic communication with the plurality of additional substrate processing chambers, wherein the memory of the platform computer further stores process module software for operating each of the plurality of additional substrate processing chambers, and wherein the platform computer further transmits signals for operating the plurality of additional substrate processing chambers based on data generated by the process module software for the respective plurality of additional substrate processing chambers.

### Claim 14

A method of operating a substrate processing system, the method comprising:
operating a first substrate processing chamber using first operating instructions generated by first process module software stored in memory on a platform computer located remote from and in electronic communication with the first substrate processing chamber;
operating a second substrate processing chamber using second operating instructions generated by second process module software stored in the memory on the platform computer located remote from and in electronic communication with the second substrate processing chamber;
creating first replacement process module software;
storing the first replacement process module software in the memory of the platform computer;
replacing the first process module software with the first replacement process module software; and
operating the first substrate processing chamber using operating instructions generated by the first replacement process module software stored in the memory on the platform computer.

### Claim 15 (depends on 14)

The method according to claim 14, further comprising:
creating second replacement process module software;
storing the second replacement process module software in the memory of the platform computer;
replacing the second process module software with the second replacement process module software; and
operating the second substrate processing chamber using operating instructions generated by the second replacement process module software stored in the memory on the platform computer.

### Claim 16 (depends on 14)

The method according to claim 14, further comprising:
creating second replacement process module software;
storing the second replacement process module software in the memory of the platform computer;
replacing the first replacement process module software with the second replacement process module software; and
operating the first substrate processing chamber using operating instructions generated by the second replacement process module software stored in the memory on the platform computer.

### Claim 17 (depends on 14)

The method according to claim 14, wherein the step of replacing the first process module software with the first replacement process module software occurs while the first substrate processing chamber is processing one or more substrates and without interrupting processing of the one or more substrates.

### Claim 18 (depends on 14)

The method according to claim 14, wherein the step of replacing the first process module software with the first replacement process module software occurs without shutting down operation of the first substrate processing chamber.

### Claim 19 (depends on 14)

The method according to claim 14, wherein the first replacement process module software comprises a software upgrade from the first process module software.

### Claim 20 (depends on 14)

The method according to claim 14, further comprising:
operating one or more additional substrate processing chambers using additional operating instructions generated by one or more additional process module software components stored in the memory on the platform computer located remote from and in electronic communication with the one or more additional substrate processing chambers;
creating an additional replacement process module software component;
storing the additional replacement process module software component in the memory of the platform computer;
replacing one of the additional process module software components with the additional replacement process module software component; and
operating a specific additional substrate processing chamber associated with the additional process module software component that was replaced by the additional replacement process module software component using operating instructions generated by the additional replacement process module software component stored in the memory on the platform computer.