Method for producing a structure comprising at least two tiles on a substrate
OwnerBruno Ghyseleninventor
Life of this patent
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Abstract
A method of manufacturing a structure comprising at least two tiles on a substrate comprises: —placing, on a support substrate, at least two tiles, the tiles being arranged on the support substrate in an incorrect distribution and/or geometry compared with a target distribution and/or geometry; —forming a mask comprising a protective film partially covering the tiles in a pattern defining the target distribution and/or geometry and at least one opening extending around the protective film; and —etching at least one tile through the opening in the mask so as to correct the arrangement of the tiles according to the target distribution and/or geometry.
Claims20
A method of manufacturing a structure comprising at least two tiles on a substrate, the method comprising:
- placing, on a support substrate, at least two tiles, the at least two tiles being arranged on the support substrate in an incorrect distribution and/or geometry relative to a target distribution and/or geometry;
- forming a mask comprising a protective film partially covering the tiles, in a pattern defining the target distribution and/or geometry and at least one opening extending around the protective film;
- and
- etching at least one tile through the opening in the mask so as to correct the arrangement of the tiles according to the target distribution and/or geometry.
Dependencies are inferred from the claim text.