# US 2025/0095950 A1 · Electron-optical device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0095950 A1 - Document ID: US20250095950A1 - Status: Published application - Kind: A1 - Application number: 18/967,282 - Filed: 2024-12-03 - Published: 2025-03-20 - Earliest claimed: 2022-06-10 - Assignees: ASML Netherlands B.V. - Applicants: ASML Netherlands B.V. - Inventors: Paul IJmert SCHEFFERS; Christiaan OTTEN; Boris DAAN; Christan TEUNISSEN; Frank Theo OVERES - Web page: https://patentgrep.com/patent/US20250095950A1 ## CPC - H01J 37/09: Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields - H01J 2237/0206: Extinguishing, preventing or controlling unwanted discharges - H01J 2237/0216: Means for avoiding or correcting vibration effects - H01J 2237/026: Shields - H01J 2237/0262: electrostatic - H01J 2237/0266: electromagnetic - H01J 2237/03: Mounting, supporting, spacing or insulating electrodes - H01J 2237/0453: multiple apertures - H01J 2237/15: Means for deflecting or directing discharge - H01J 2237/28: Scanning microscopes - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A charged particle-optical device for projecting a plurality of charged particle beams along respective beam paths towards a sample location, the charged particle-optical device comprising: a charged particle-optical assembly configured to manipulate the charged particle beams, the charged particle-optical assembly comprising a first charged particle-optical element comprising a plate having one or more apertures around a beam path of the charged particle beams; and an electrical connector configured to electrically connect the plate of the first charged particle-optical element to an electrical power source, wherein the electrical connector: comprises a shield configured to define a field free region substantially free of electric fields; and is configured to be electrically connectable to a flexible coupling configured to electrically connect the plate of the first charged particle-optical element to the electrical power source, the flexible coupling located within the field free region. ## Claims ### Claim 1 A charged particle-optical device for projecting a plurality of charged particle beams along respective beam paths towards a sample location, the charged particle-optical device comprising: a charged particle-optical assembly configured to manipulate the charged particle beams, the charged particle-optical assembly comprising a first charged particle-optical element comprising a plate having one or more apertures around a beam path of the charged particle beams; and an electrical connector configured to electrically connect the plate of the charged particle-optical element to an electrical power source, wherein the electrical connector comprises a shield configured to define a field free region substantially free of electric fields and the electrical connector is configured to be electrically connectable via a flexible coupling configured to electrically connect the plate of the charged particle-optical element to the electrical power source, the flexible coupling located within the field free region. ### Claim 2 (depends on 1) The charged particle-optical device of claim 1, wherein at least part of the shield overlaps the plate of the charged particle-optical element when viewed in a direction perpendicular to a plane of the plate of the charged particle-optical element. ### Claim 3 (depends on 2) The charged particle-optical device of claim 2, wherein the part of the shield that overlaps the plate of the charged particle-optical element is at only one of an up-beam side and a down-beam side of the plate. ### Claim 4 (depends on 1) The charged particle-optical device of claim 1, wherein the plate of the charged particle-optical element is configured to be electrically connectable to the flexible coupling via the shield. ### Claim 5 (depends on 1) The charged particle-optical device of claim 1, wherein the shield is mechanically fixed relative to the plate of the charged particle-optical element by a mechanical connection. ### Claim 6 (depends on 5) The charged particle-optical device of claim 5, wherein the shield and the plate are electrically connected via the mechanical connection. ### Claim 7 (depends on 1) The charged particle-optical device of claim 1, wherein the charged particle-optical assembly comprises at least one isolator adjacent to the plate. ### Claim 8 (depends on 7) The charged particle-optical device of claim 7, wherein the isolator is substantially planar. ### Claim 9 (depends on 7) The charged particle-optical device of claim 7, wherein the isolator is substantially parallel to the plate. ### Claim 10 (depends on 7) The charged particle-optical device of claim 7, wherein the plate comprises a protrusion that protrudes beyond a radially outward periphery of the isolator with respect to the beam paths. ### Claim 11 (depends on 1) The charged particle-optical device of claim 1, wherein the flexible coupling comprises a resilient element which is resilient in a degree of freedom. ### Claim 12 (depends on 11) The charged particle-optical device of claim 11, wherein the flexible coupling has an elongated direction and the resilient element is resilient in a degree of freedom corresponding to the elongate direction of the flexible coupling. ### Claim 13 (depends on 1) The charged particle device of claim 1, wherein the flexible coupling is configured to be positionable with respect to the shield in at least five degrees of freedom. ### Claim 14 (depends on 1) The charged particle-optical device of claim 1, wherein the shield is arranged to surround the flexible coupling when viewed in at least one direction. ### Claim 15 (depends on 14) The charged particle-optical device of claim 14, wherein the shield defines a recess configured to receive the flexible coupling.