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US 2025/0095944 A1Published application
Electron gun using virtual source method
AssigneeKorea Research Institute of Standards and Science
InventorsIn Yong Park, Takashi Ogawa, Ha Rim Lee, Junhyeok Hwang
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Abstract
Provided is an electron gun using a virtual source method that may have a high angular current density, a narrow energy distribution, and stable electron emission characteristics by forming a virtual source inside a thermal electron source (LaB6, CeB6)-based emitter emitting an electron beam.
Claims7
An electron gun using a virtual source method, the electron gun comprising:
- an emitter emitting an electron beam to the outside;
- a suppressor electrode disposed at a position surrounding the emitter based on a direction of emission of the electron beam;
- and
- an extraction electrode disposed on one side of the suppressor electrode,
- wherein the emitter has a virtual source formed therein and emits the electron beam to the outside.
2 more elements
Dependencies are inferred from the claim text.