Composition mixture control of efem environment
AssigneeLam Research Corporation
InventorsBrandon SENN, Scott Vernon WONG, Travis R. TAYLOR
Life of this patent
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Abstract
A composition mixture control system for an equipment front end module includes a manifold, flow controllers and a composition controller. The flow controllers are configured to control flow of respective gases to the manifold, where the manifold is configured to mix the gases received from the flow controllers and direct a resultant gas mixture to an enclosure in the equipment front end module. The composition controller is configured to control operation of the flow controllers to adjust a composition in the enclosure to a set target composition including the gases.
Claims42
A composition mixture control system for an equipment front end module, the composition mixture control system comprising:
- a manifold;
- a plurality of flow controllers configured to control flow of respective gases to the manifold,
- wherein the manifold is configured to mix the gases received from the plurality of flow controllers and direct a resultant gas mixture to an enclosure in the equipment front end module;
- and
- a composition controller configured to control operation of the plurality of flow controllers to adjust a composition in the enclosure to a set target composition comprising the gases.
A composition control method comprising:
- controlling flow of gases to a manifold via a plurality of flow controllers;
- mixing the gases in the manifold to provide a resultant gas mixture;
- supplying the resultant gas mixture to an enclosure in an equipment front end module;
- and
- controlling operation of the plurality of flow controllers to adjust a composition in the enclosure to a set target composition comprising the gases.
Dependencies are inferred from the claim text.