# US 2025/0093631 A1 · Laser irradiation method and laser irradiation apparatus

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- Number: US 2025/0093631 A1
- Document ID: US20250093631A1
- Status: Published application
- Kind: A1
- Application number: 18/727,148
- Filed: 2023-01-16
- Published: 2025-03-20
- Earliest claimed: 2022-01-19
- Assignees: Kyoto University; Amada Company, Limited
- Applicants: Kyoto University; Amada Co., Ltd.
- Inventors: Susumu NODA; Kaori USUDA
- Web page: https://patentgrep.com/patent/US20250093631A1

## CPC

- B23K 26/073: Shaping the laser spot
- G02B 19/0047: {for use with a light source (G02B19/009, G02B19/0095 take precedence; details of lighting devices in general F21V; non-semiconductor lasers having optical devices external to the laser cavity H01S3/005)}
- B23K 1/0016: {Soldering of electronic components}
- B23K 1/0056: {soldering by means of beams, e.g. lasers, electron beams [EB]}
- B23K 26/0604: {by a combination of beams}
- B23K 26/0648: {comprising lenses}
- B23K 26/0665: {by beam condensation on the workpiece, e.g. for focusing}
- B23K 26/20: Bonding (soldering by means of radiant energy B23K1/005)
- B23K 26/21: by welding
- G02B 19/0009: {having refractive surfaces only}
- H01S 5/11: Comprising a photonic bandgap structure
- H01S 5/42: Arrays of surface emitting lasers
- H01S 5/18: Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S 5/187: using Bragg reflection
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A laser irradiation apparatus including: a photonic crystal surface emitting laser (PCSEL) element configured to emit a laser beam; a laser head configured to focus the laser beam emitted from the PCSEL element by a focusing lens thereof in an optical transmission path by spatial propagation; and a moving mechanism configured to irradiate the laser beam focused by the focusing lens onto an object to be irradiated with the laser beam at any irradiation position within a Rayleigh length range regardless of a beam waist position of the laser beam in an optical axis direction by a movement of the focusing lens relative to the object to be irradiated along the optical axis direction of the laser beam.

## Claims

### Claim 1

A laser irradiation method comprising:
entering a laser beam emitted from a photonic crystal surface emitting laser element to a focusing lens by spatial propagation; and
irradiating the laser beam focused by the focusing lens onto an object to be irradiated with the laser beam at any irradiation position within a Rayleigh length range regardless of a beam waist position of the laser beam in an optical axis direction of the laser beam.

### Claim 2 (depends on 1)

The laser irradiation method according to claim 1, wherein
the irradiation position is set to an inner focus position on a side closer to the focusing lens than the beam waist position of the laser beam focused by the focusing lens or an outer focus position on an opposite side of the focusing lens from the beam waist position.

### Claim 3 (depends on 1)

The laser irradiation method according to claim 1, wherein
laser beams emitted from a plurality of photonic crystal surface emitting laser elements arranged in a two-dimensional manner are irradiated onto the object to be irradiated at a plurality of irradiation positions.

### Claim 4 (depends on 3)

The laser irradiation method according to claim 3, wherein
each of the irradiation positions is set to a position where two adjacent laser beams partially overlap in a beam radial direction of the laser beams, among the plurality of laser beams emitted from the plurality of photonic crystal surface emitting laser elements arranged in a two-dimensional manner.

### Claim 5 (depends on 3)

The laser irradiation method according to claim 3, wherein
the laser beams emitted from the plurality of photonic crystal surface emitting laser elements arranged in a two-dimensional manner are individually set in correspondence with the irradiation positions of the laser beams emitted from the plurality of photonic crystal surface emitting laser elements.

### Claim 6 (depends on 3)

The laser irradiation method according to claim 3, wherein
the plurality of laser beams emitted from the plurality of photonic crystal surface emitting laser elements arranged in a two-dimensional manner are irradiated onto the object to be irradiated with a multi-spot beam, the multi-spot beam forming a pattern in which an arrangement of the plurality of photonic crystal surface emitting laser elements is reduced by focusing performed by the focusing lens.

### Claim 7 (depends on 6)

The laser irradiation method according to claim 6, wherein
the plurality of photonic crystal surface emitting laser elements are individually mounted on circuit boards and arranged in a one-dimensional manner or a two-dimensional manner.

### Claim 8 (depends on 5)

The laser irradiation method according to claim 5, wherein
the plurality of photonic crystal surface emitting laser elements are mounted on a single circuit board.

### Claim 9 (depends on 3)

The laser irradiation method according to claim 3, wherein
inputs to the plurality of photonic crystal surface emitting laser elements are individually controlled.

### Claim 10

A laser irradiation apparatus comprising:
a photonic crystal surface emitting laser element configured to emit a laser beam;
a laser head configured to focus the laser beam emitted from the photonic crystal surface emitting laser element by a focusing lens thereof in an optical transmission path by spatial propagation of the laser beam; and
a moving mechanism configured to irradiate the laser beam focused by the focusing lens onto an object to be irradiated with the laser beam at any irradiation position within a Rayleigh length range regardless of a beam waist position of the laser beam in an optical axis direction by a movement of the focusing lens relative to the object to be irradiated along the optical axis direction of the laser beam.