# US 2025/0093593 A1 · Optical device and method of manufacture

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- Number: US 2025/0093593 A1
- Document ID: US20250093593A1
- Status: Published application
- Kind: A1
- Application number: 18/403,531
- Filed: 2024-01-03
- Published: 2025-03-20
- Earliest claimed: 2023-09-15
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: Wen-Chih Lin; Cheng-Yu Kuo; Yen-Hung Chen; Hsuan-Ting Kuo; Chia-Shen Cheng; Chao-Wei Li; Ching-Hua Hsieh; Wen-Chih Chiou; Ming-Fa Chen; Shang-Yun Hou
- Web page: https://patentgrep.com/patent/US20250093593A1

## CPC

- G02B 6/4214: {the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence)}
- G02B 6/4244: {Mounting of the optical elements}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

Optical devices and methods of manufacture are presented in which a mirror structure is utilized to transmit and receive optical signals to and from an optical device. In embodiments the mirror structure receives optical signals from outside of an optical device and directs the optical signals through at least one mirror to an optical component of the optical device.

## Claims

### Claim 1

A method of manufacturing an optical device, the method comprising:
attaching a first mirror structure to a first optical package,
wherein after the attaching the first mirror structure, a first mirror within the first mirror structure is aligned with an edge coupler within the first optical package and
wherein after the attaching the first mirror structure, a first optical fiber is located within the first mirror structure.

### Claim 2 (depends on 1)

The method of claim 1, wherein the first mirror structure comprises a first microlens.

### Claim 3 (depends on 1)

The method of claim 1, wherein the first optical fiber is aligned to send optical signals to the first mirror.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first mirror structure comprises a second mirror.

### Claim 5 (depends on 4)

The method of claim 4, wherein the first optical fiber is aligned to send optical signals to the second mirror.

### Claim 6 (depends on 1)

The method of claim 1, wherein the attaching the first mirror structure comprises:
attaching a first receptacle to the first optical package; and
attaching the first mirror structure to the first receptacle.

### Claim 7 (depends on 1)

The method of claim 1, wherein the attaching the first mirror structure comprises attaching the first mirror structure directly to the first optical package with an adhesive.

### Claim 8

A method of manufacturing an optical device, the method comprising:
placing an adhesive onto a first optical package, wherein the first optical package comprising an edge coupler;
adhering a first mirror structure to the adhesive, wherein after the adhering the first mirror structure a first mirror within the first mirror structure is aligned with the edge coupler; and
connecting a second mirror structure to the first mirror structure, the second mirror structure comprising a second mirror and a first optical fiber.

### Claim 9 (depends on 8)

The method of claim 8, wherein after the adhering the first mirror structure a first microlens is located between the first mirror and the edge coupler.

### Claim 10 (depends on 8)

The method of claim 8, wherein the adhering the first mirror structure to the adhesive places the first mirror structure in physical contact with the adhesive.

### Claim 11 (depends on 8)

The method of claim 8, further comprising attaching the first optical package onto an interposer substrate.

### Claim 12 (depends on 8)

The method of claim 8, further comprising attaching the first optical package onto a silicon substrate.

### Claim 13 (depends on 8)

The method of claim 8, further comprising attaching the first optical package onto a redistribution structure.

### Claim 14 (depends on 8)

The method of claim 8, wherein the first mirror comprises an array of mirrors.

### Claim 15

An optical device comprising:
a first optical package; and
a first mirror structure adhered to the first optical package, the first mirror structure comprising:
a first mirror aligned with an edge coupler within the first optical package; and
a first optical fiber.

### Claim 16 (depends on 15)

The optical device of claim 15, wherein the first optical fiber is aligned parallel with a sidewall of the first optical package.

### Claim 17 (depends on 15)

The optical device of claim 15, wherein the first mirror structure further comprises a second mirror, the second mirror being aligned with an output of the first optical fiber.

### Claim 18 (depends on 17)

The optical device of claim 17, wherein the first mirror structure comprises:
a first portion comprising the first mirror; and
a second portion comprising the second mirror, the first portion extending into the second portion.

### Claim 19 (depends on 15)

The optical device of claim 15, further comprising a microlens located within the first mirror structure and located between the first mirror and the edge coupler.

### Claim 20 (depends on 15)

The optical device of claim 15, wherein the first mirror structure is adhered to the first optical package with a first receptacle.
