# US 2025/0093573 A1 · Locally antireflection-coated split pupil input couplers for multisheet diffractive waveguides

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- Number: US 2025/0093573 A1
- Document ID: US20250093573A1
- Status: Published application
- Kind: A1
- Application number: 18/885,271
- Filed: 2024-09-13
- Published: 2025-03-20
- Earliest claimed: 2023-09-15
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Simon LORENZO; Evan WANG; Kunal SHASTRI; Samarth BHARGAVA
- Web page: https://patentgrep.com/patent/US20250093573A1

## CPC

- G02B 6/0076: {Stacked arrangements of multiple light guides of the same or different cross-sectional area}
- G02B 1/11: Anti-reflection coatings
- G02B 6/0016: {Grooves, prisms, gratings, scattering particles or rough surfaces}
- G02B 6/0026: {Wavelength selective element, sheet or layer, e.g. filter or grating}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A method and apparatus for a device including a first waveguide, the first waveguide having a first input coupler operable to receive a first color light and in-couple the first color light into the first waveguide, and a coating area adjacent to a grating of the first input coupler, the coating area operable to receive a second color light, the coating area having an anti-reflective coating with a transmission refractive index such that in operation the second color light is transmitted through the first waveguide to a second waveguide, the second waveguide below the first waveguide, the second waveguide having a second input coupler disposed below and aligned with the coating area, the second input coupler operable to receive the second color light and in-couple the second color light into the second waveguide.

## Claims

### Claim 1

A device, comprising:
a first waveguide, the first waveguide comprising:
a first input coupler operable to receive a first color light and in-couple the first color light into the first waveguide; and
a coating area adjacent to a grating of the first input coupler, the coating area operable to receive a second color light, the coating area having an anti-reflective coating with a transmission refractive index such that in operation the second color light is transmitted through the first waveguide to a second waveguide; and
the second waveguide below the first waveguide, the second waveguide having a second input coupler disposed below and aligned with the coating area, the second input coupler operable to receive the second color light and in-couple the second color light into the second waveguide.

### Claim 2 (depends on 1)

The device of claim 1, wherein the first waveguide has an output coupler to out-couple a blue field of view (FOV) and a green FOV from the first color light that is in-coupled.

### Claim 3 (depends on 1)

The device of claim 1, wherein the device further comprises an output coupler to out-couple a red field of view (FOV) from the second color light that is in-coupled.

### Claim 4 (depends on 1)

The device of claim 1, further comprising a light engine disposed above the first waveguide with a pupil above the first input coupler.

### Claim 5 (depends on 1)

The device of claim 1, wherein the anti-reflective coating is disposed over a first surface of the first waveguide opposing a second surface, under the second surface, or both over and under the second surface.

### Claim 6 (depends on 1)

The device of claim 1, wherein the first input coupler is operable to in-couple the first color light into the first waveguide.

### Claim 7 (depends on 1)

The device of claim 1, wherein the second input coupler is operable to in-couple the second color light into the first waveguide.

### Claim 8 (depends on 1)

The device of claim 1, wherein the anti-reflective coating has a thickness, the thickness being equal to a quarter-wavelength thickness value associated with a material.

### Claim 9 (depends on 1)

The device of claim 1, wherein the transmission refractive index is a mean of a refractive index of a first material of the first waveguide and a second material between the coating area and the first input coupler.

### Claim 10

A device, comprising:
a first waveguide, the first waveguide having:
a first input coupler operable to receive a first color light and in-couple the first color light into the first waveguide; and
a first coating area adjacent to a first grating of the first input coupler, the first coating area operable to receive a second color light and a third color light, the first coating area having a first anti-reflective coating with a first transmission refractive index such that in operation the second color light is transmitted through the first waveguide to a second waveguide, and the first coating area having a second anti-reflective coating with a second transmission refractive index such that in operation the third color light is transmitted through the first waveguide to the second waveguide;
the second waveguide, the second waveguide having:
a second input coupler operable to receive the second color light and in-couple the second color light into the second waveguide; and
a second coating area adjacent to a second grating of the second input coupler, the second coating area operable to receive the third color light, the second coating area having a third anti-reflective coating with a third transmission refractive index such that in operation the third color light is transmitted through the second waveguide to a third waveguide; and
the third waveguide below the second waveguide, the third waveguide having a third input coupler disposed below and aligned with the second coating area, the third input coupler operable to receive the third color light and in-couple the third color light into the third waveguide.

### Claim 11 (depends on 10)

The device of claim 10, wherein the device further comprises an output coupler to out-couple a blue field of view (FOV).

### Claim 12 (depends on 10)

The device of claim 10, wherein the device further comprises an output coupler to out-couple a green field of view (FOV).

### Claim 13 (depends on 10)

The device of claim 10, wherein the device further comprises an output coupler to out-couple a red field of view (FOV).

### Claim 14 (depends on 10)

The device of claim 10, further comprising a light engine disposed above the first waveguide with a pupil above the first input coupler.

### Claim 15 (depends on 10)

The device of claim 10, wherein the first anti-reflective coating is disposed over a first surface of the first waveguide opposing a second surface of the first waveguide, under the second surface, or both over and under the second surface, and the second anti-reflective coating is disposed over a third surface of the second waveguide opposing a fourth surface of the second waveguide, under the third surface, or both over and under the third surface.

### Claim 16 (depends on 10)

The device of claim 10, wherein the first input coupler is operable to in-couple the first color light into the first waveguide.

### Claim 17 (depends on 10)

The device of claim 10, wherein the second input coupler is operable to in-couple only the second color light into the first waveguide.

### Claim 18 (depends on 10)

The device of claim 10, wherein the first anti-reflective coating, the second anti-reflective coating, and the third anti-reflective coating have a thickness, the thickness being equal to a quarter-wavelength thickness value associated with a material.

### Claim 19 (depends on 10)

The device of claim 10, wherein the first transmission refractive index is a first mean of a first refractive index of a first material of the first waveguide and a second material between the first coating area and the first input coupler, the second transmission refractive index is a second mean of a second refractive index of the first material of the first waveguide and a third material between the second coating area and the first input coupler, and the third transmission refractive index is a third mean of a third refractive index of a fourth material of the second waveguide and a fifth material between the second coating area and the second input coupler.

### Claim 20

A method for using a device, comprising:
in-coupling a first color light into a first waveguide, the first waveguide having a first input coupler operable to receive the first color light; and
receiving a second color light at a coating area adjacent to a grating of the first input coupler, the coating area having an anti-reflective coating with a transmission refractive index such that in operation the second color light is transmitted through the first waveguide to a second waveguide, the second waveguide below the first waveguide, the second waveguide having a second input coupler disposed below and aligned with the coating area, the second input coupler operable to receive the second color light and in-couple the second color light into the second waveguide.
