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US 2025/0093558 A1Published application
Mirror and mirror substrate with high aspect ratio, and method and means for producing such a mirror substrate
AssigneeSchott AG
InventorsMartin Schaefer, Marco Weisenburger, Volker Seibert, Thomas Westerhoff
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Abstract
A mirror substrate is made of a material having a coefficient of mean linear thermal expansion of less than or equal to 1*10−6/K. The mirror substrate includes at least one of: a ratio of a lateral dimension to a maximum thickness of at least 100,, a weight per unit area of 100 kg/m2 or less,, and a mirror surface with a roughness (Ra) of at most 3.5 μm.
Claims27
A mirror substrate comprising:
- a material having a coefficient of mean linear thermal expansion of less than or equal to 1*10−6/K;
- a maximum thickness;
- a lateral dimension;
- a ratio of the lateral dimension to the maximum thickness that is at least 100 or a weight per unit area that is 100 kg/m2 or less;
- and
- a mirror surface that has an average roughness (Ra) of at most 3.5 μm.
3 more elements
An assembly comprising:
- a mirror substrate that has a material having a coefficient of mean linear thermal expansion of less than or equal to 1*10−6/K and at least one feature selected from a group consisting of:
- a ratio of a lateral dimension to a maximum thickness of at least 100, a weight per unit area of 100 kg/m2 or less, and a mirror surface with a roughness (Ra) of at most 3.5 μm;
- a support that supports the mirror substrate during processing, transport, or both processing and transport and comprises a material having a coefficient of mean linear thermal expansion of less than or equal to 1*10−6/K;
- and
- a surface of the support,
- wherein the surface of the support and a surface of the mirror substrate that is bearing on the surface of the support have opposite complementary curvatures.
3 more elements
Dependencies are inferred from the claim text.