# US 2025/0093534 A1 · Radiation detector, and radiation detector array

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- Number: US 2025/0093534 A1
- Document ID: US20250093534A1
- Status: Published application
- Kind: A1
- Application number: 18/725,838
- Filed: 2022-11-11
- Published: 2025-03-20
- Earliest claimed: 2022-01-05
- Assignees: Hamamatsu Photonics K.K.
- Applicants: Hamamatsu Photonics K.K.
- Inventors: Shogo KAMAKURA; Hayato NISHIMIYA; Shintaro KAMADA
- Web page: https://patentgrep.com/patent/US20250093534A1

## CPC

- G01T 1/1642: {using a scintillation crystal and position sensing photodetector arrays, e.g. ANGER cameras}
- G01T 1/20182: {Modular detectors, e.g. tiled scintillators or tiled photodiodes (stacked detectors G01T1/20181)}
- G01T 1/2018: {Scintillation-photodiode combinations}
- G01T 1/20183: {Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk}
- G01T 1/20187: {Position of the scintillator with respect to the photodiode, e.g. photodiode surrounding the crystal, the crystal surrounding the photodiode, shape or size of the scintillator}
- G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00)

## Abstract

The radiation detector includes a scintillator, first and second semiconductor photodetectors, a first wiring member electrically connected to the first semiconductor photodetector, and a second wiring member electrically connected to the second semiconductor photodetector. The scintillator includes a pair of end surfaces opposing each other in a first direction and first and second side surfaces opposing each other in a second direction intersecting the first direction, and has a rectangular shape when viewed in the first direction. The first and second side surfaces couple the pair of end surfaces. The first semiconductor photodetector includes a first semiconductor substrate disposed to oppose the first side surface. The second semiconductor photodetector includes a second semiconductor substrate disposed to oppose the second side surface.

## Claims

### Claim 1

A radiation detector comprising:
a scintillator including a pair of end surfaces opposing each other in a first direction, and a first side surface and a second side surface opposing each other in a second direction intersecting the first direction and coupling the pair of end surfaces, the scintillator having a rectangular shape when viewed in the first direction;
a first semiconductor photodetector including a first semiconductor substrate disposed to oppose the first side surface;
a second semiconductor photodetector including a second semiconductor substrate disposed to oppose the second side surface;
a first wiring member electrically connected to the first semiconductor photodetector; and
a second wiring member electrically connected to the second semiconductor photodetector, wherein
a length of the scintillator in the first direction is longer than both of a length of the scintillator in the second direction and a length of the scintillator in a third direction parallel to the first side surface,
a length of the first side surface in the first direction is longer than a width of the first side surface in the third direction,
a length of the second side surface in the first direction is longer than a width of the second side surface in the third direction,
the first semiconductor substrate includes
a first portion covered with the first side surface, and
a second portion disposed with the first portion in the first direction and exposed from the first side surface,
the second semiconductor substrate includes
a third portion covered with the second side surface, and
a fourth portion disposed with the third portion in the first direction and exposed from the second side surface,
each of the first semiconductor photodetector and the second semiconductor photodetector includes a plurality of photodetection regions including at least one avalanche photodiode arranged to operate in Geiger mode, and at least one quenching resistor electrically connected in series with one of an anode or a cathode of a corresponding avalanche photodiode of the at least one avalanche photodiode,
the first semiconductor photodetector includes
a plurality of first electrodes electrically connected to the at least one quenching resistor included in the first semiconductor photodetector and included in a corresponding photodetection region of the plurality of photodetection regions, and
a second electrode electrically connected to another of the anode or the cathode of the avalanche photodiode included in the first semiconductor photodetector and included in the corresponding photodetection region of the plurality of photodetection regions,
the second semiconductor photodetector includes
a plurality of third electrodes electrically connected to the at least one quenching resistor included in the second semiconductor photodetector and included in the corresponding photodetection region of the plurality of photodetection regions, and
a fourth electrode electrically connected to another of the anode or the cathode of the avalanche photodiode included in the second semiconductor photodetector and included in the corresponding photodetection region of the plurality of photodetection regions,
the plurality of photodetection regions included in the first semiconductor photodetector are disposed in the first portion,
the plurality of first electrodes and the second electrode are disposed in the second portion,
the plurality of photodetection regions included in the second semiconductor photodetector are disposed in the third portion,
the plurality of third electrodes and the fourth electrode are disposed in the fourth portion,
the first wiring member includes a plurality of conductors electrically connected to a corresponding first electrode of the plurality of first electrodes, and a conductor connected to the second electrode, and
the second wiring member includes a plurality of conductors electrically connected to at least one of the third electrodes of the plurality of third electrodes, and a conductor connected to the fourth electrode.

### Claim 2 (depends on 1)

The radiation detector according to claim 1, wherein
when viewed in the second direction, one region formed by outline of the plurality of photodetection regions included in the first semiconductor substrate has an outline shape corresponding to an outline shape of the first side surface, and
when viewed in the second direction, one region formed by outline of the plurality of photodetection regions included in the second semiconductor substrate has an outline shape corresponding to an outline shape of the second side surface.

### Claim 3 (depends on 1)

The radiation detector according to claim 1, wherein
the scintillator includes a plurality of portions disposed independently of each other in the first direction,
each of the plurality of portions is positioned corresponding to a corresponding photodetection region of the plurality of photodetection regions disposed in each of the first semiconductor substrate and the second semiconductor substrate,
each of the plurality of portions includes a pair of opposing surfaces that oppose each other in the first direction, and a first coupling surface and a second coupling surface that couple the pair of opposing surfaces,
the first coupling surface oppose the first semiconductor substrate, and
the second coupling surface oppose the second semiconductor substrate and oppose the first coupling surface in the second direction.

### Claim 4 (depends on 3)

The radiation detector according to claim 3, wherein
the plurality of portions are joined to each other.

### Claim 5 (depends on 4)

The radiation detector according to claim 4, further comprising
a light reflecting member, wherein
the light reflecting member is disposed between the plurality of portions.

### Claim 6 (depends on 3)

The radiation detector according to claim 3, wherein,
when viewed in the second direction, each of the plurality of photodetection regions included in the first semiconductor substrate has an outline shape corresponding to an outline shape of the first coupling surface of a corresponding portion of the plurality of portions, the first coupling surface that opposes the first semiconductor substrate, and
when viewed in the second direction, each of the plurality of photodetection regions included in the second semiconductor substrate has an outline shape corresponding to an outline shape of the second coupling surface of a corresponding portion of the plurality of portions, the second coupling surface that opposes the second semiconductor substrate.

### Claim 7 (depends on 1)

The radiation detector according to claim 1, wherein
the plurality of photodetection regions include a first photodetection region and a second photodetection region closer to the second portion than the first photodetection region,
a width of a conductive wire electrically connecting the first electrode corresponding to the first photodetection region and the first photodetection region is larger than a width of a conductive wire electrically connecting the first electrode corresponding to the second photodetection region and the second photodetection region, and
a width of a conductive wire electrically connecting the third electrode corresponding to the first photodetection region and the first photodetection region is larger than a width of a conductive wire electrically connecting the third electrode corresponding to the second photodetection region and the second photodetection region.

### Claim 8 (depends on 1)

The radiation detector according to claim 1, further comprising
a reinforcement body disposed between the second portion and the fourth portion, wherein
the reinforcement body covers the second portion and the fourth portion and couples the second portion and the fourth portion.

### Claim 9 (depends on 1)

The radiation detector according to claim 1, wherein
the first semiconductor substrate includes a first surface opposing the scintillator in the second direction and a second surface opposing the first surface in the second direction,
the second semiconductor substrate includes a third surface opposing the scintillator in the second direction and a fourth surface opposing the third surface in the second direction, and
the second surface and the fourth surface include polished surfaces.

### Claim 10 (depends on 1)

The radiation detector according to claim 1, further comprising:
a first base including a fifth surface and a sixth surface opposing each other in the second direction and be disposed such that the first semiconductor substrate is positioned between the fifth surface and the scintillator;
a second base including a seventh surface and an eighth surface opposing each other in the second direction and be disposed such that the second semiconductor substrate is positioned between the seventh surface and the scintillator;
a plurality of first terminals disposed on the fifth surface;
a second terminal disposed on the fifth surface;
a plurality of third terminals disposed on the seventh surface;
a fourth terminal disposed on the seventh surface;
a first wire electrically connecting each of the plurality of first terminals and each of the first electrodes;
a second wire electrically connecting the second terminal and the second electrode;
a third wire electrically connecting each of the plurality of third terminals and each of the third electrodes; and
a fourth wire electrically connecting the fourth terminal and the fourth electrode, wherein
the first base includes a fifth portion covered with the first semiconductor substrate and a sixth portion disposed with the fifth portion in the first direction and exposed from the first semiconductor substrate,
the second base includes a seventh portion covered with the second semiconductor substrate and an eighth portion disposed with the seventh portion in the first direction and exposed from the second semiconductor substrate,
the first terminals and the second terminal are positioned on the sixth portion, and
the third terminals and the fourth terminal are positioned on the eighth portion.

### Claim 11 (depends on 1)

The radiation detector according to claim 1, further comprising:
a first cover body disposed such that the first semiconductor substrate is positioned between the first cover body and the scintillator; and
a second cover body disposed such that the second semiconductor substrate is positioned between the second cover body and the scintillator, wherein
each of the first cover body and the second cover body includes at least one of a light reflector and an electrical insulator.

### Claim 12 (depends on 1)

The radiation detector according to claim 1, wherein
the first wiring member is disposed on the same side as the scintillator relative to the first semiconductor substrate, and
the second wiring member is disposed on the same side as the scintillator relative to the second semiconductor substrate.

### Claim 13 (depends on 1)

The radiation detector according to claim 1, wherein
at least a part of the first wiring member and the scintillator are disposed in front of the same surface of the first semiconductor substrate, and
at least a part of the second wiring member and the scintillator are disposed in front of the same surface of the second semiconductor substrate.

### Claim 14 (depends on 10)

The radiation detector according to claim 10, wherein
at least a part of the first wiring member and the scintillator are disposed in front of the same surface of the first base, and
at least a part of the second wiring member and the scintillator are disposed in front of the same surface of the second base.

### Claim 15 (depends on 1)

The radiation detector according to claim 1, wherein
the first wiring member and the second wiring member and the first semiconductor substrate and the second semiconductor substrate have flexibility,
the flexibility of the first wiring member is higher than the flexibility of the first semiconductor substrate, and
the flexibility of the second wiring member is higher than the flexibility of the second semiconductor substrate.

### Claim 16 (depends on 1)

A radiation detector array comprising
a plurality of radiation detectors disposed one-dimensionally, wherein
each of the plurality of radiation detectors is the radiation detector according to claim 1,
the scintillator further includes a pair of third side surfaces coupling the pair of end surfaces and coupling the first side surface and the second side surface, and
any two radiation detectors adjacent to each other of the plurality of radiation detectors are disposed such that the third side surface of the scintillator included in one radiation detector and the third side surface of the scintillator included in another radiation detector oppose each other.

### Claim 17 (depends on 16)

The radiation detector array according to claim 16, wherein
the first semiconductor photodetectors included in the plurality of radiation detectors are integrally formed, and
the second semiconductor photodetectors included in the plurality of radiation detectors are integrally formed.

### Claim 18 (depends on 16)

A radiation detector array comprising
a plurality of radiation detectors disposed two-dimensionally in a matrix, wherein
each of a plurality of radiation detectors disposed in a row direction of the plurality of radiation detectors is the radiation detector array according to claim 16, and
any two radiation detectors adjacent to each other in a column direction of the plurality of radiation detectors are disposed such that either the first semiconductor photodetector or the second semiconductor photodetector included in one radiation detector and either the first semiconductor photodetector or the second semiconductor photodetector included in the other radiation detector oppose each other in the column direction.

### Claim 19 (depends on 1)

A radiation detector array comprising
a plurality of radiation detectors disposed one-dimensionally, wherein
each of the plurality of radiation detectors is the radiation detector according to claim 1,
the scintillator further includes a pair of third side surfaces coupling the pair of end surfaces and coupling the first side surface and the second side surface, and
any two radiation detectors adjacent to each other of the plurality of radiation detectors are disposed such that the third side surface of the scintillator included in one radiation detector and either the first semiconductor photodetector or the second semiconductor photodetector included in the other radiation detector oppose each other.

### Claim 20 (depends on 19)

A radiation detector array comprising
a plurality of radiation detectors disposed two-dimensionally in a matrix, wherein
each of a plurality of radiation detectors disposed in a row direction of the plurality of radiation detectors is the radiation detector array according to claim 19, and
any two radiation detectors adjacent to each other in a column direction of the plurality of radiation detectors are disposed such that the third side surface of the scintillator included in one radiation detector and either the first semiconductor photodetector or the second semiconductor photodetector included in the other radiation detector oppose each other in the column direction.
