Techniques for robust machine vision systems

A system configured to generate a three-dimensional (3D) image of an object, the system comprising:

• a light source configured to emit a beam and modulate a wavelength of the beam;
• a coupler configured to split the beam into a first beam and a second beam;
• a first interferometer comprising a first reference arm and a first measurement arm, the first interferometer configured to:
• split the first beam into a first reference beam travelling along the first reference arm and a first measurement beam travelling along the first measurement arm, and
• provide a first output based on the first reference beam and a first reflected beam of the first measurement beam as reflected by the object;
• a second interferometer configured to provide a second output based on the second beam;
• a beam deflection device configured to direct the first measurement beam towards the object along a plurality of directions;
• and
• a motion module configured to provide a plurality of relative positions between the object and the beam deflection device, wherein:
• the 3D image is generated, by a processor, based on the first output of the first interferometer, the second output of the second interferometer, the plurality of directions, and the plurality of relative positions and/or orientations.

A system configured to generate a three-dimensional (3D) image of an object in relative motion to the system, the system comprising:

• a light source configured to emit a beam and modulate a wavelength of the beam;
• a coupler configured to split the beam into a first beam and a second beam;
• a first interferometer comprising a first reference arm and a first measurement arm, the first interferometer configured to:
• split the first beam into a first reference beam travelling along the first reference arm and a first measurement beam travelling along the first measurement arm, and
• provide a first output based on the first reference beam and a first reflected beam of the first measurement beam as reflected by the object;
• a second interferometer configured to provide a second output based on the second beam;
• and
• a beam deflection device configured to direct the first measurement beam towards the object along a plurality of directions, the relative motion of the object providing a plurality of positions between the object and the beam deflection device, wherein:
• the 3D image is generated, by a processor, based on the first output of the first interferometer, the second output of the second interferometer, the plurality of directions, and the plurality of positions.

A system configured to generate a three-dimensional (3D) image of an object, the system comprising:

• a light source configured to emit a beam and modulate a wavelength of the beam;
• a coupler configured to split the beam into a plurality of first beams and a second beam;
• a plurality of first interferometers, each of the plurality of first interferometers comprising a first reference arm and a first measurement arm and configured to:
• split a respective one of the plurality of first beams into a first reference beam travelling along the first reference arm and a first measurement beam travelling along the first measurement arm, and
• provide a first output based on the first reference beam and a first reflected beam of the first measurement beam as reflected by the object;
• a second interferometer configured to provide a second output based on the second beam;
• a beam deflection device configured to direct the first measurement beams towards the object along a plurality of directions;
• and
• a motion module configured to provide a plurality of relative positions and/or orientations between the object and the beam deflection device, wherein:
• the 3D image is generated, by a processor based on the first outputs of the plurality of first interferometers, the second output of the second interferometer, the plurality of directions, and the plurality of relative positions and/or orientations.