# US 2025/0093384 A1 · Prober, performance board, probe card, and substrate inspecting apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0093384 A1 - Document ID: US20250093384A1 - Status: Published application - Kind: A1 - Application number: 18/817,410 - Filed: 2024-08-28 - Published: 2025-03-20 - Earliest claimed: 2023-09-19 - Assignees: Kioxia Corporation - Applicants: Kioxia Corporation - Inventors: Hiroki KAMATA - Web page: https://patentgrep.com/patent/US20250093384A1 ## CPC - G01R 1/07314: {the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735)} - G01R 31/2831: {Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates (G01R31/318511 takes precedence; testing during manufacture H10P74/00)} - G01R 31/2889: {Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract In one embodiment, a prober includes a stage configured to hold a substrate as an inspection object. The prober further includes a housing configured to hold a probe card that can be electrically connected to the substrate, and hold a performance board that can be electrically connected to the probe card. Moreover, the housing is configured to function as a ground line, and includes a connection path configured to electrically connect the probe card and the performance board. ## Claims ### Claim 1 A prober comprising: a stage configured to hold a substrate as an inspection object; and a housing configured to hold a probe card that can be electrically connected to the substrate, and hold a performance board that can be electrically connected to the probe card, wherein the housing is configured to function as a ground line, and includes a connection path configured to electrically connect the probe card and the performance board. ### Claim 2 (depends on 1) The prober of claim 1, wherein the connection path includes: a first connecting portion configured to electrically connect the connection path to the performance board; a second connecting portion configured to electrically connect the connection path to the probe card; and a path configured to electrically connect the first connecting portion and the second connecting portion. ### Claim 3 (depends on 2) The prober of claim 2, wherein the first connecting portion is a first supporting portion configured to support the performance board to be electrically connected to the performance board; and the second connecting portion is a second supporting portion configured to support the probe card to be electrically connected to the probe card. ### Claim 4 (depends on 3) The prober of claim 3, wherein the first supporting portion is a bump configured to support the performance board; and the second supporting portion is a bump configured to support the probe card. ### Claim 5 (depends on 1) The prober of claim 1, wherein the performance board includes: a first line configured to function as a ground line; and a first line connecting portion configured to electrically connect the first line to the connection path, and the probe card includes: a second line configured to function as a ground line; and a second line connecting portion configured to electrically connects the second line to the connection path. ### Claim 6 (depends on 5) The prober of claim 5, wherein the first line connecting portion is a first supported portion configured to be supported by the housing to be electrically connected to the connection path, and the second line connecting portion is a second supported portion configured to be supported by the housing to be electrically connected to the connection path. ### Claim 7 (depends on 6) The prober of claim 6, wherein each of the first supported portion and the second supported portion is a pad configured to be supported by the housing. ### Claim 8 (depends on 1) The prober of claim 1, wherein the housing includes a frame configured to hold a plurality of blocks, and each of the blocks is configured to hold a connecting member configured to electrically connect the probe card and the performance board. ### Claim 9 (depends on 8) The prober of claim 8, wherein at least a portion of the connection path is provided in the frame. ### Claim 10 (depends on 8) The prober of claim 8, wherein the connection path includes: a first connecting portion configured to electrically connect the connection path to the performance board; a second connecting portion configured to electrically connect the connection path to the probe card; and a path provided in the frame, and configured to electrically connect the first connecting portion and the second connecting portion. ### Claim 11 (depends on 10) The prober of claim 10, wherein the first connecting portion is a bump configured to contact the performance board; and the second connecting portion is a bump configured to contact the probe card. ### Claim 12 (depends on 8) The prober of claim 8, wherein the performance board includes: a first line configured to function as a ground line; and a first line connecting portion configured to electrically connect the first line to the connection path, and the probe card includes: a second line configured to function as a ground line; and a second line connecting portion configured to electrically connect the second line to the connection path. ### Claim 13 (depends on 12) The prober of claim 12, wherein each of the first line connecting portion and the second line connecting portion is a pad configured to contact the housing. ### Claim 14 A performance board that can be electrically connected to a substrate as an inspection object via a probe card, comprising: a first line configured to function as a ground line; and a first line connecting portion configured to electrically connect the first line to a housing of a prober configured to hold the substrate. ### Claim 15 (depends on 14) The board of claim 14, wherein the first line connecting portion is a first supported portion configured to be supported by the housing to be electrically connected to the housing. ### Claim 16 A probe card that can be electrically connected to a substrate as an inspection object, comprising: a second line configured to function as a ground line; and a second line connecting portion configured to electrically connect the second line to a housing of a prober configured to hold the substrate. ### Claim 17 (depends on 16) The card of claim 16, wherein the second line connecting portion is a second supported portion configured to be supported by the housing to be electrically connected to the housing. ### Claim 18 A substrate inspecting apparatus comprising: a probe card that can be electrically connected to a substrate as an inspection object; a tester including a performance board that can be electrically connected to the probe card; and a prober including a stage configured to hold the substrate, and a housing configured to hold the probe card and the performance board, wherein the housing is configured to function as a ground line, and includes a connection path configured to electrically connects the probe card and the performance board. ### Claim 19 (depends on 18) The apparatus of claim 18, further comprising: a ground member provided in a vicinity of the prober, and configured to function as a ground line; and a first filter provided between the prober and the ground member, and having a predetermined mutual inductance. ### Claim 20 (depends on 18) The apparatus of claim 18, further comprising a second filter provided between the prober and another prober in the substrate inspecting apparatus, and having a predetermined mutual inductance.