# US 2025/0093264 A1 · Waveguide excitation uniformity

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- Number: US 2025/0093264 A1
- Document ID: US20250093264A1
- Status: Published application
- Kind: A1
- Application number: 18/962,212
- Filed: 2024-11-27
- Published: 2025-03-20
- Earliest claimed: 2020-01-14
- Assignees: Quantum-Si Incorporated
- Applicants: Quantum-Si Incorporated
- Inventors: Gerard Schmid; Sharath Hosali; James Beach; Kyle Preston; Ali Kabiri; Bing Shen
- Web page: https://patentgrep.com/patent/US20250093264A1

## CPC

- G01N 21/6428: {Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" (in vivo A61B5/00; immunoassay G01N33/53)}
- G01N 21/648: {using evanescent coupling or surface plasmon coupling for the excitation of fluorescence}
- B01L 3/50857: {using arrays or bundles of open capillaries for holding samples}
- C12Q 1/6816: characterised by the detection means (C12Q1/6804 takes precedence)
- G01N 21/6454: {using an integrated detector array}
- G02B 6/1228: {Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305)}
- G02B 6/14: Mode converters
- B01L 2300/0654: Lenses; Optical fibres
- B01L 2300/0829: Multi-well plates; Microtitration plates
- G01N 21/6408: {with measurement of decay time, time resolved fluorescence}
- G01N 2021/6471: {Special filters, filter wheel}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- C12Q: MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS (immunoassay G01N33/53); COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

Systems and methods for optical power distribution within an integrated device, in a substantially uniform manner, to a large number of sample wells and/or other photonic elements. The integrated device and related instruments and systems may be used to analyze samples in parallel. The integrated device may include a grating coupler configured to receive light from an excitation source and optically couple with multiple waveguides configured to couple with sample wells. Vertical extents of optical modes of individual waveguides may be modulated to adjust confinement of light within the waveguides. This modulation may enable more uniform distribution of excitation light to the sample wells, improve excitation efficiency, and prevent overpower on regions of the integrated device.

## Claims

### Claim 1

A system comprising:
an array of reaction chambers;
first and second waveguides configured to deliver excitation light to at least a portion of the array of the reaction chambers; and
a dummy structure disposed between the first and second waveguides,
wherein the dummy structure extends along a length of the first waveguide.

### Claim 2 (depends on 1)

The system of claim 1, wherein the first waveguide tapers in a direction in which the excitation light travels.

### Claim 3 (depends on 2)

The system of claim 2, wherein the dummy structure tapers in a direction opposite to the direction in which the excitation light travels.

### Claim 4 (depends on 3)

The system of claim 3, wherein the second waveguide tapers in the direction in which the excitation light travels.

### Claim 5 (depends on 1)

The system of claim 1, comprising:
a plurality of waveguides comprising the first and second waveguides; and
a plurality of dummy structures comprising the dummy structure disposed between the first and second waveguides,
wherein the plurality of waveguides and the plurality of dummy structures are disposed alternatively.

### Claim 6 (depends on 5)

The system of claim 5, wherein the plurality of waveguides and the plurality of dummy structures are in a waveguide core layer.

### Claim 7 (depends on 6)

The system of claim 6, wherein a cladding layer between the waveguide core layer and the reaction chambers has a uniform thickness.

### Claim 8 (depends on 5)

The system of claim 5, wherein:
the plurality of waveguides each tapers in a direction in which the excitation light travels; and
the plurality of dummy structures each tapers in a direction opposite to the direction in which the excitation light travels.

### Claim 9 (depends on 5)

The system of claim 5, wherein:
the plurality of waveguides have tapered widths in a first direction; and
the plurality of dummy structures have tapered widths in a second direction opposite to the first direction.

### Claim 10

A method comprising:
providing first and second waveguides to deliver excitation light to an array of reaction chambers; and
providing a dummy structure between the first and second waveguides,
wherein the dummy structure extends along a length of the first waveguide.

### Claim 11 (depends on 10)

The method of claim 10, wherein the dummy structure is provided simultaneously with the first and second waveguides.

### Claim 12 (depends on 10)

The method of claim 10, wherein both the dummy structure and the first and second waveguides are provided by transferring a topography of a photoresist layer to a waveguide core layer.

### Claim 13 (depends on 10)

The method of claim 10, wherein the first waveguide tapers in a direction in which the excitation light travels.

### Claim 14 (depends on 13)

The method of claim 13, wherein the dummy structure tapers in a direction opposite to the direction in which the excitation light travels.

### Claim 15 (depends on 14)

The method of claim 14, wherein the second waveguide tapers in the direction in which the excitation light travels.

### Claim 16

A system comprising:
an array of reaction chambers;
a waveguide configured to deliver excitation light to at least a portion of the array of the reaction chambers; and
a dummy structure disposed adjacent to the waveguide and extending along a length of the waveguide.

### Claim 17 (depends on 16)

The system of claim 16, wherein the waveguide and the dummy structure taper in opposite directions.

### Claim 18 (depends on 16)

The system of claim 16, wherein the waveguide tapers in a direction in which the excitation light travels.

### Claim 19 (depends on 16)

The system of claim 16, comprising:
a plurality of waveguides comprising the waveguide; and
a plurality of dummy structures comprising the dummy structure,
wherein the plurality of dummy structures are disposed adjacent respective waveguides of the plurality of waveguides.

### Claim 20 (depends on 19)

The system of claim 19, wherein:
the plurality of waveguides have tapered widths in a first direction; and
the plurality of dummy structures have tapered widths in a second direction opposite to the first direction.