Apparatus and method for producing trifluoramine oxide

Abstract

An apparatus for producing trifluoramine oxide includes: a reactor in which a photochemical reaction for generating trifluoramine oxide by using vapor-phase FNO and F2 as starting materials is performed; an ultraviolet irradiation means for irradiating ultraviolet rays having a peak wavelength in a wavelength band of 300 nm to 400 nm into the reactor; and a separation and collection means which is in vapor communication with the reactor, separating and collecting generated trifluoramine oxide from reaction products generated in the reactor. The ultraviolet rays are such that an intensity of rays having a wavelength band of less than 300 nm is less than 5% of an intensity of rays having a wavelength band of 300 nm to 400 nm.

Dependencies are inferred from the claim text.