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US 2025/0088175 A1Published application
Piezoelectric trenches interleaved with heavy-metal electrodes of a saw resonator
AssigneeQorvo US, Inc.
InventorPatrik Rath
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Abstract
A surface acoustic wave (SAW) resonator device is provided. The SAW resonator device includes a first electrode positioned on an upper surface of a piezoelectric film. The first electrode may include a plurality of layers wherein a layer of the plurality of layers is a first heavy metal layer. The SAW resonator device may also include a first piezoelectric trench (PZT) positioned adjacent to the first electrode. The first PZT includes a recess in the piezoelectric film.
Claims21
A surface acoustic wave (SAW) resonator device, comprising:
- a first electrode positioned on an upper surface of a piezoelectric film, the first electrode comprising a plurality of layers wherein a layer of the plurality of layers is a first heavy metal layer;
- and
- a first piezoelectric trench (PZT) positioned adjacent to the first electrode, the first PZT including a recess in the piezoelectric film.
A surface acoustic wave (SAW) resonator device, comprising:
- a plurality of electrodes positioned on an upper surface of a piezoelectric film of a first thickness, each electrode of the plurality of electrodes comprising at least one heavy metal layer;
- and
- a plurality of piezoelectric trenches (PZTs) formed within the piezoelectric film between the plurality of electrodes, wherein the plurality of PZTs correspond to regions of the piezoelectric film of a second thickness less than the first thickness.
A method, comprising:
- receiving a surface acoustic wave (SAW) resonator device, the device comprising:
- a piezoelectric film;
- an interdigital transducer including a plurality of interleaved electrodes positioned on the piezoelectric film, each electrode of the plurality of interleaved electrodes comprising a heavy metal layer;
- and
- a sacrificial layer positioned on the plurality of interleaved electrodes;
- and
- applying an ion beam to the upper surface of the SAW resonator device such that the sacrificial layer is removed and forming piezoelectric trenches (PZTs) between the plurality of interleaved electrodes.
4 more elements
Dependencies are inferred from the claim text.