Charged particle-optical apparatus

A method for assessing a sample at an assessment location, the method comprising:

• projecting with a preparatory charged particle-optical device a preparatory charged particle beam along a preparatory beam path, the preparatory charged particle beam for preparing a sample for assessment;
• projecting a light beam toward the sample at an illumination location;
• and
• projecting with an assessment charged particle-optical device an assessment charged particle beam along an assessment beam path toward the sample at an assessment location, the assessment charged particle beam for assessing the sample at the assessment location;
• wherein the light beam is projected toward the sample at the illumination location when the sample is away from the assessment location.

A charged particle-optical apparatus for assessing a sample at an assessment location, the charged particle-optical apparatus comprising:

• an assessment charged particle-optical device configured to project an assessment charged particle beam along an assessment beam path toward an assessment location, the assessment charged particle beam for assessing a sample at the assessment location;
• and
• a preparatory charged particle-optical device configured to project a preparatory charged particle beam along a preparatory beam path, the preparatory charged particle beam for preparing a sample for assessment;
• wherein the assessment charged particle-optical device comprises:
• one or more charged particle-optical elements which comprise a microelectron-mechanical component and/or an objective lens comprising a plurality of objective lenses for different beams of the assessment charged particle beam.