Substrate manufacturing equipment comprehensive digital twin fleet

A method for controlling a physical twin chamber for substrate processing, the method comprising:

• determining, by a digital twin device, a first data set associated with a physical twin chamber;
• wherein the digital twin device comprises one or more computational models for determining characteristics of the physical twin and for generating the control inputs;
• wherein the first data set comprises direct measurement of physical processes collected and reported by sensors implemented in the physical twin chamber and data collected and reported by internal sensors of the digital twin device;
• automatically generating, by the digital twin device, a second data set that comprises the control inputs, and transmitting the second data set, by the digital twin device, to the physical twin chamber for controlling substrate processing by the physical twin chamber;
• and
• wherein the second data set is automatically generated by the digital twin device based on, at least in part, the first data set, and by executing the one or more computational models of the digital twin device.

A substrate processing system, comprising:

• a digital twin device determining characteristics of a physical twin chamber and generating control inputs for controlling the physical twin chamber;
• wherein the digital twin device comprises one or more computational models for determining the characteristics of the physical twin and for generating the control inputs;
• wherein the digital twin device comprises a processor and a memory coupled to the processor, the memory having stored instructions executable by the processor to:
• determine, by the digital twin device a first data set associated with the physical twin chamber;
• wherein the first data set comprises direct measurement of physical processes collected and reported by sensors implemented in the physical twin chamber and data collected and reported by internal sensors of the digital twin device;
• automatically generate, by the digital twin device, a second data set that comprises the control inputs, and transmit the second data set, by the digital twin device, to the physical twin chamber for substrate processing by the physical twin chamber;
• and
• wherein the second data set is automatically generated by the digital twin device based on, at least in part, the first data set, and by executing the one or more computational models of the digital twin device.