A device for alternately controlling the operation state of two treatment equipment, wherein two treatment equipment are alternately operated to treat process emissions from semiconductor manufacturing, each of the treatment equipment being defined as a first treatment equipment unit and a second treatment equipment unit;
- a first pipeline is connected to both of the first treatment equipment unit and the manufacturing equipment generating the emissions, and a second pipeline is connected to both of the second treatment equipment unit and the manufacturing equipment;
- the emissions are selectively conveyed through the first pipeline or the second pipeline to either the first treatment equipment unit or the second treatment equipment unit;
- a first electric heating unit comprises a plurality of first electric heating belts and a first temperature controller, each of the first electric heating belts being sequentially configured along the first pipeline and respectively cladding on the first pipeline, the first temperature controller detecting the temperature of the first pipeline and controlling each of the first electric heating belts to generate heat energy based on the detection;
- a second electric heating unit comprises a plurality of second electric heating belts and a second temperature controller, each of the second electric heating belts being sequentially configured along the second pipeline and respectively cladding on the second pipeline, the second temperature controller detecting the temperature of the second pipeline and controlling each of the second electric heating belts to generate heat energy based on the detection;
- a first control valve is disposed at a directional end of the first pipeline connected to the manufacturing equipment, and a second control valve is disposed at a directional end of the second pipeline connected to the manufacturing equipment;
- the control device comprises a human-machine interface controller, a programmable controller, and a signal transmission port, wherein the human-machine interface controller is electrically connected to the programmable controller, the programmable controller is electrically connected to the signal transmission port, and the signal transmission port is coupled to the first control valve and the second control valve, and wherein the first temperature controller and the second temperature controller are coupled in parallel to the signal transmission port;
- the human-machine interface controller comprises a display, a switching circuit, and a microprocessor, wherein the display and the switching circuit are each electrically connected to the microprocessor, and wherein the display displays the temperatures of the first pipeline and the second pipeline based on the signals from the microprocessor, and displays the on/off status of the first control valve and the second control valve;
- the switching circuit transmits a first control signal to the microprocessor based on the user operation, the microprocessor processes the first control signal and transmits a second control signal to the programmable controller based on the processing results;
- and the programmable controller processes the second control signal and, based on the processing results, sequentially controls the first control valve, the second control valve, the first temperature controller, and the second temperature controller through the signal transmission port, respectively, so that the first electric heating unit and the second electric heating unit are selected to ramp up or down the power rate, and the first control valve and the second control valve are selected to open or close the connection state of the first pipeline and the second pipeline to the manufacturing equipment, respectively.