# US 2025/0085494 A1 · Method and apparatus for handling an optical device, method for handling a waveguide

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- Number: US 2025/0085494 A1
- Document ID: US20250085494A1
- Status: Published application
- Kind: A1
- Application number: 18/815,156
- Filed: 2024-08-26
- Published: 2025-03-13
- Earliest claimed: 2023-09-08
- Applicants: Applied Materials, Inc.
- Inventors: Davide COLLA
- Web page: https://patentgrep.com/patent/US20250085494A1

## CPC

- B29D 11/00432: {Auxiliary operations, e.g. machines for filling the moulds (B29D11/00125 takes precedence)}
- G02B 6/4259: {of the transparent type}
- G02B 6/241: {Light guide terminations}
- G02B 6/34: utilising prism or grating {(G02B6/293 takes precedence)}
- G02B 6/4239: {Adhesive bonding; Encapsulation with polymer material}
- G02B 27/0172: {characterised by optical features}
- G02B 2027/0125: {Field-of-view increase by wavefront division}
- B29D: PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE (making granules B29B9/00; making preforms B29B11/00)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A method for handling an optical device is provided. The method includes providing the optical device in a suspended state using a contactless suspension system, the optical device having two major surfaces. The method includes gripping the optical device in the suspended state using a gripper having a set of side supports, wherein the gripping of the optical device includes moving the set of side supports from an open position to a closed position, wherein, in the closed position, one or more side surfaces of the optical device extending between the two major surfaces of the optical device are held by the set of side supports. The method includes transporting the optical device using the gripper.

## Claims

### Claim 1

A method for handling an optical device, comprising:
providing the optical device in a suspended state using a contactless suspension system, the optical device having two major surfaces;
gripping the optical device in the suspended state using a gripper having a set of side supports, wherein the gripping of the optical device includes moving the set of side supports from an open position to a closed position, wherein, in the closed position, one or more side surfaces of the optical device extending between the two major surfaces of the optical device are held by the set of side supports; and
transporting the optical device using the gripper.

### Claim 2 (depends on 1)

The method of claim 1, wherein the optical device is a waveguide comprising a substrate and a plurality of optical structures formed thereon.

### Claim 3 (depends on 1)

The method of claim 1, wherein the optical device is transported by the gripper without contacting the two major surfaces of the optical device.

### Claim 4 (depends on 1)

The method of claim 1, wherein the set of side supports defines an optical device containment region of the gripper, wherein a dimension of the optical device containment region is adjustable by adjusting a position of at least one side support of the set of side supports.

### Claim 5 (depends on 4)

The method of claim 4, wherein moving the set of side supports from the open position to the closed position reduces the dimension of the optical device containment region.

### Claim 6 (depends on 4)

The method of claim 4, wherein, in the open position of the set of side supports, a dimension of the optical device containment region is larger than a corresponding dimension of the optical device to allow for a tolerance between the optical device and the set of side supports.

### Claim 7 (depends on 1)

The method of claim 1, further comprising:
holding the optical device in a supported state, wherein in the supported state the optical device is mechanically held by a holder;
positioning the gripper adjacent to the optical device in the supported state;
after the positioning, transferring the optical device from the supported state to the suspended state, wherein the transferring includes:
disengaging the optical device from the holder; and
providing the optical device in the suspended state.

### Claim 8 (depends on 7)

The method of claim 7, wherein disengaging the optical device from the holder includes lifting the optical device from the holder by a contactless suspension force provided by the contactless suspension system to provide the optical device in the suspended state.

### Claim 9 (depends on 7)

The method of claim 7, wherein, upon disengaging the optical device from the holder, a sideward movement of the optical device is restricted by the set of side supports of the gripper.

### Claim 10 (depends on 1)

The method of claim 1, wherein the contactless suspension system comprises an ultrasonic vibration generator for providing a contactless repulsive force acting on the optical device.

### Claim 11 (depends on 1)

The method of claim 1, wherein the contactless suspension system is a first contactless suspension system, the method further comprising:
positioning the optical device held by the gripper adjacent to a second contactless suspension system, wherein the second contactless suspension system is equal to or different from the first contactless suspension system;
providing a contactless suspension force by the second contactless suspension system; and
releasing the optical device from the gripper while the contactless suspension force acts on the optical device to provide the optical device in a suspended state using the second contactless suspension system.

### Claim 12 (depends on 1)

The method of claim 1, wherein the gripper is a second gripper, wherein the method is a method of transferring the optical device from a first gripper to the second gripper via the contactless suspension system, the method further comprising:
holding the optical device using the first gripper;
positioning the optical device held by the first gripper adjacent to the contactless suspension system;
providing a contactless suspension force by the contactless suspension system; and
releasing the optical device from the first gripper while the contactless suspension force acts on the optical device, so that the optical device is provided in a suspended state upon release from the first gripper,
wherein, after the releasing, the optical device in the suspended state is gripped by the second gripper by providing of the set of side supports in the closed position.

### Claim 13

A method for handling an optical device, comprising:
holding the optical device in a supported state, wherein in the supported state the optical device is mechanically held by a holder, the optical device having two major surfaces;
positioning a gripper adjacent to the optical device in the supported state, the gripper including a set of side supports defining an optical device containment region of the gripper;
after the positioning, transferring the optical device from the supported state to a suspended state, wherein the transferring includes:
disengaging the optical device from the holder; and
providing the optical device in the suspended state using a contactless suspension system;
providing the optical device in the suspended state in the optical device containment region of the gripper while the set of side supports is in an open position;
gripping the optical device in the suspended state by moving the set of side supports from the open position to a closed position to reduce a dimension of the optical device containment region, wherein, in the closed position, one or more side surfaces of the optical device extending between the two major surfaces are held by the set of side supports; and
transporting the optical device away from the contactless suspension system using the gripper.

### Claim 14

A method for handling a waveguide, comprising:
holding a waveguide in a supported state, wherein in the supported state the waveguide is mechanically held by a holder, the waveguide having two major surfaces;
transferring the waveguide from the supported state to a suspended state, wherein the waveguide is provided in the suspended state by a contactless suspension system including an ultrasonic vibration generator;
gripping the waveguide in the suspended state using a gripper; and
transporting the waveguide held by the gripper away from the contactless suspension system.

### Claim 15 (depends on 14)

The method of claim 14, further comprising:
positioning the gripper adjacent to the waveguide in the supported state, wherein the transferring of the waveguide from the supported state to the suspended state is performed after the positioning.

### Claim 16 (depends on 14)

The method of claim 14, wherein the transferring of the waveguide from the supported state to the suspended state includes lifting the waveguide from the holder by a contactless suspension force provided by the contactless suspension system, wherein the contactless suspension force moves the waveguide from the holder to a waveguide receiving area of the gripper.

### Claim 17 (depends on 14)

The method of claim 14, wherein the contactless suspension system is a first contactless suspension system, the method further comprising:
positioning the waveguide held by the gripper adjacent to a second contactless suspension system, wherein the second contactless suspension system is equal to or different from the first contactless suspension system;
providing a contactless suspension force by the second contactless suspension system; and
releasing the waveguide from the gripper while the contactless suspension force acts on the waveguide to provide the waveguide in a suspended state using the second contactless suspension system.

### Claim 18

An apparatus for handling an optical device comprising:
a contactless suspension system;
a gripper having a set of side supports that is movable between an open position and a closed position; and
a controller configured to:
control the contactless suspension system to provide the optical device in a suspended state;
control the gripper to grip the optical device in the suspended state, wherein the gripping of the optical device includes moving the set of side supports from the open position to the closed position, wherein, in the closed position, one or more side surfaces of the optical device extending between two major surfaces of the optical device are held by the set of side supports; and
control the gripper to transport the optical device.

### Claim 19 (depends on 18)

The apparatus of claim 18, wherein the set of side supports defines an optical device containment region of the gripper, wherein a dimension of the optical device containment region is adjustable by adjusting a position of at least one side support of the set of side supports.

### Claim 20 (depends on 19)

The apparatus of claim 19, wherein, in the open position of the set of side supports, a dimension of the optical device containment region is larger than a corresponding dimension of the optical device to allow for a tolerance between the optical device and the set of side supports.
