# US 2025/0085474 A1 · Nested waveguide fan-out structure and methods for forming the same

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- Number: US 2025/0085474 A1
- Document ID: US20250085474A1
- Status: Published application
- Kind: A1
- Application number: 18/463,522
- Filed: 2023-09-08
- Published: 2025-03-13
- Earliest claimed: 2023-09-08
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company Limited
- Inventors: Chun-Hao Fann; Ming Lee; Wei-Heng Lin; Hsing-Kuo Hsia; Chen-Hua Yu
- Web page: https://patentgrep.com/patent/US20250085474A1

## CPC

- G02B 6/12002: {Three-dimensional structures}
- G02B 6/125: Bends, branchings or intersections
- G02B 6/13: Integrated optical circuits characterised by the manufacturing method
- G02B 2006/12119: {Bend}
- G02B 2006/1215: {Splitter}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An optical beam splitter includes a multi-stage nested network of waveguide bifurcation branches, which includes: first-stage waveguide bifurcation branches each including a pair of first-stage waveguide segments, and second-stage waveguide bifurcation branches each including a pair of second-stage waveguide segments. Each pair of first-stage waveguide segments includes a first common end and a pair of first split ends and a pair of first interconnection portions. Each first common end points toward a first widthwise direction. Each pair of second-stage waveguide segments includes a second common end and a pair of second split ends and a pair of second interconnection portions. Each second common end and each second split end of the optical beam splitter point toward a second widthwise direction which is an opposite direction of the first widthwise direction.

## Claims

### Claim 1

A device structure comprising an optical beam splitter, wherein the optical beam splitter comprises a multi-stage nested network of waveguide bifurcation branches that comprise:
first-stage waveguide bifurcation branches each comprising a pair of first-stage waveguide segments, wherein each pair of first-stage waveguide segments comprises a first common end and a pair of first split ends and a pair of first interconnection portions connecting the first common end to a respective first split end within the pair of first split ends, wherein each first common end of the optical beam splitter points toward a first widthwise direction of the optical beam splitter, and each first interconnection portion of the optical beam splitter comprises a respective first outer convex sidewall segment that generally faces a second widthwise direction that is an opposite direction of the first widthwise direction; and
second-stage waveguide bifurcation branches each comprising a pair of second-stage waveguide segments, wherein each pair of second-stage waveguide segments comprises a second common end and a pair of second split ends and a pair of second interconnection portions connecting the second common end to a respective second split end within the pair of second split ends.

### Claim 2 (depends on 1)

The device structure of claim 1, wherein each of the second split ends of the optical beam splitter is connected to a respective first common end of the first-stage waveguide bifurcation branches, wherein each second common end and each second split end of the optical beam splitter point toward the second widthwise direction of the optical beam splitter.

### Claim 3 (depends on 2)

The device structure of claim 2, wherein each second interconnection portion of the optical beam splitter comprises a respective second outer convex sidewall segment that generally faces the first widthwise direction.

### Claim 4 (depends on 1)

The device structure of claim 1, wherein a total angular propagation direction change within each first interconnection portion of the optical beam splitter is not greater than 180 degrees in a plan view.

### Claim 5 (depends on 1)

The device structure of claim 1, wherein:
the first-stage waveguide bifurcation branches comprise optical channels that are connected to optical ports;
each of the optical ports is nested within the multi-stage nested network of waveguide bifurcation branches in all horizontal directions; and
each curving segment of the first interconnection portions of the optical beam splitter has a respective first inner convex sidewall segment having a first radius of curvature.

### Claim 6 (depends on 5)

The device structure of claim 5, wherein:
each curving segment of the second interconnection portions of the optical beam splitter has a respective second inner convex sidewall segment having a second radius of curvature; and
each of the second interconnection portions of the optical beam splitter comprises a pair of curving segments each having a respective total angular propagation direction change of 90 degrees and a straight segment connecting the pair of curving segments.

### Claim 7 (depends on 5)

The device structure of claim 5, wherein each first interconnection portion of the optical beam splitter consists of a respective curving segment.

### Claim 8 (depends on 1)

The device structure of claim 1, wherein an entirety of the multi-stage nested network of waveguide bifurcation branches consists of a single continuous waveguide structure having a uniform height throughout.

### Claim 9 (depends on 8)

The device structure of claim 8, wherein the device structure comprises a first die that comprises:
first dielectric material layers having formed therein the multi-stage nested network of waveguide bifurcation branches;
optical devices that are optically connected to a respective first split end of the first-stage waveguide bifurcation branches; and
first metal interconnect structures that are electrically connected to electrical nodes of the optical devices and formed within the first dielectric material layers.

### Claim 10 (depends on 1)

The device structure of claim 1, wherein:
each of the first-stage waveguide bifurcation branches has a first lateral extent along a lengthwise direction of the optical beam splitter that is perpendicular to the first widthwise direction;
each of the second-stage waveguide bifurcation branches has a second lateral extent along the lengthwise direction of the optical beam splitter; and
the second lateral extent is greater than the first lateral extent.

### Claim 11

A device structure comprising an optical beam splitter, wherein the optical beam splitter comprises a multi-stage nested network of waveguide bifurcation branches that comprise, for each of at least two consecutive positive integers i that includes 1 and 2:
(2i−1)-th-stage waveguide bifurcation branches each comprising a pair of (2i−1)-th-stage waveguide segments, wherein each pair of (2i−1)-th-stage waveguide segments comprises a (2i−1)-th common end and a pair of (2i−1)-th split ends and a pair of (2i−1)-th interconnection portions connecting the (2i−1)-th common end to a respective (2i−1)-th split end within the pair of (2i−1)-th split ends, wherein each (2i−1)-th common end of the optical beam splitter points toward a first widthwise direction of the optical beam splitter, and each (2i−1)-th interconnection portion of the optical beam splitter comprises a respective (2i−1)-th outer convex sidewall segment that generally faces a second widthwise direction that is an opposite direction of the first widthwise direction; and
2i-th-stage waveguide bifurcation branches each comprising a pair of 2i-th-stage waveguide segments, wherein each pair of 2i-th-stage waveguide segments comprises a 2i-th common end and a pair of 2i-th split ends and a pair of 2i-th interconnection portions connecting the 2i-th common end to a respective 2i-th split end within the pair of 2i-th split ends, wherein each of the 2i-th split ends of the optical beam splitter is connected to a respective (2i−1)-th common end of the (2i−1)-th-stage waveguide bifurcation branches, wherein each 2i-th common end and each 2i-th split end of the optical beam splitter point toward the second widthwise direction of the optical beam splitter.

### Claim 12 (depends on 11)

The device structure of claim 11, wherein:
each of the first-stage waveguide bifurcation branches has a first lateral extent along a lengthwise direction of the optical beam splitter that is perpendicular to the first widthwise direction;
each of the second-stage waveguide bifurcation branches has a second lateral extent along the lengthwise direction, the second lateral extent being greater than the first lateral extent; and
each of the third-stage waveguide bifurcation branches has a third lateral extent along the lengthwise direction, the third lateral extent being greater than the second lateral extent.

### Claim 13 (depends on 12)

The device structure of claim 12, wherein the third lateral extent is greater than twice the second lateral extent.

### Claim 14 (depends on 13)

The device structure of claim 13, wherein the first lateral extent is greater than one half of the third lateral extent.

### Claim 15 (depends on 11)

The device structure of claim 11, further comprising optical devices that are optically connected to a respective first split end of the first-stage waveguide bifurcation branches.

### Claim 16

A method of forming a device structure, the method comprising:
forming a waveguide material layer over a dielectric material layer; and
patterning the waveguide material layer into a multi-stage nested network of waveguide bifurcation branches, which comprises:
first-stage waveguide bifurcation branches each comprising a pair of first-stage waveguide segments, wherein each pair of first-stage waveguide segments comprises a first common end and a pair of first split ends and a pair of first interconnection portions connecting the first common end to a respective first split end within the pair of first split ends, wherein each first common end and each first split end of the optical beam splitter point to a first widthwise direction of the optical beam splitter, and each first interconnection portion of the optical beam splitter comprises a respective first outer convex sidewall segment that generally faces a second widthwise direction that is an opposite direction of the first widthwise direction; and
second-stage waveguide bifurcation branches each comprising a pair of second-stage waveguide segments, wherein each pair of second-stage waveguide segments comprises a second common end and a pair of second split ends and a pair of second interconnection portions connecting the second common end to a respective second split end within the pair of second split ends, wherein each of the second split ends of the optical beam splitter is connected to a respective first common end of the first-stage waveguide bifurcation branches, wherein each second common end and each second split end of the optical beam splitter point to the second widthwise direction of the optical beam splitter.

### Claim 17 (depends on 16)

The method of claim 16, further comprising:
forming optical devices that are optically connected to a respective first split end of the first-stage waveguide bifurcation branches; and
forming first metal interconnect structures, first metal bonding pads, and additional first dielectric material layers over the multi-stage nested network, wherein the first metal interconnect structures and the first metal bonding pads are electrically connected to electrical nodes of the optical devices, whereby a first die is provided.

### Claim 18 (depends on 17)

The method of claim 17, further comprising:
providing a second die including a semiconductor substrate, semiconductor devices located on the semiconductor substrate, second metal interconnect structures firmed located within second dielectric material layers, and second metal bonding pads electrically connected to the second metal interconnect structures; and
attaching the second die to the first die by bonding the second metal bonding pads to the first metal bonding pads.

### Claim 19 (depends on 16)

The method of claim 16, wherein an entirety of the multi-stage nested network of waveguide bifurcation branches is formed as a single continuous waveguide structure having a uniform height throughout.

### Claim 20 (depends on 16)

The method of claim 16, wherein:
a total angular propagation direction change within each first interconnection portion of the optical beam splitter is not greater than 180 degrees in a plan view; and
a total angular propagation direction change within each second interconnection portion of the optical beam splitter is 180 degrees in the plan view.