# US 2025/0085348 A1 · Information processing device, display and input device, and program > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0085348 A1 - Document ID: US20250085348A1 - Status: Published application - Kind: A1 - Application number: 18/956,642 - Filed: 2024-11-22 - Published: 2025-03-13 - Earliest claimed: 2022-06-06 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Kazunari ISHII - Web page: https://patentgrep.com/patent/US20250085348A1 ## CPC - G01R 31/31912: {Tester/user interface} - G01R 1/06: Measuring leads; Measuring probes (G01R19/145, G01R19/165 take precedence) - G01R 31/26: Testing of individual semiconductor devices (testing of photovoltaic devices H02S50/10; testing or measuring during manufacture or treatment {H10P74/00}) - G01R 31/28: Testing of electronic circuits, e.g. by signal tracer ({EMC, EMP or similar testing of electronic circuits G01R31/002;} testing for short-circuits, discontinuities, leakage or incorrect line connection G01R31/50; checking computers {or computer components} G06F11/00; checking static stores for correct operation G11C29/00 {; testing receivers or transmitters of transmission systems H04B17/00}) - G01R 31/2891: {related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05)} - H10P 74/00: Testing or measuring during manufacture or treatment of wafers, substrates or devices - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract With respect to an information processing device for setting polishing content of probes configured to contact devices under test, the information processing device includes a processor; and a memory storing program instructions that cause the processor to set a polishing area in a polishing member configured to polish the probes; set an operation pattern to be used during the polishing of the probes; and calculate a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern. ## Claims ### Claim 1 An information processing device for setting polishing content of probes configured to contact devices under test, comprising: a processor; and a memory storing program instructions that cause the processor to: set a polishing area in a polishing member configured to polish the probes; set an operation pattern to be used during the polishing of the probes; and calculate a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern. ### Claim 2 (depends on 1) The information processing device as claimed in claim 1, further comprising: a stage for moving the polishing member in three-dimensional directions; and a control device configured to control an operation of the stage, wherein the information processing device is connected to a test device that actually polishes the probes, and transmits the set polishing area and the set operation pattern to the test device. ### Claim 3 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to set a plurality of divided areas obtained by dividing the polishing area. ### Claim 4 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to set an effective range of the polishing member to be inside the polishing area, the effective range being effective for polishing the probes. ### Claim 5 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to allow a user to set the polishing area by a drag-and-drop operation at a display and input device connected to the information processing device. ### Claim 6 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to allow a user to select a plurality of types of said operation patterns. ### Claim 7 (depends on 6) The information processing device as claimed in claim 6, wherein the plurality of types of operation patterns include a first direction pattern in which the polishing member reciprocates in a first direction, a second direction pattern in which the polishing member reciprocates in a second direction orthogonal to the first direction, a diagonal direction pattern in which the polishing member reciprocates in a direction diagonal to the first direction and the second direction, and a circumferential direction pattern in which the polishing member circumferentially moves along a polygonal path. ### Claim 8 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to allow a user to set the operation pattern by a drag-and-drop operation at a display and input device connected to the information processing device. ### Claim 9 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to form a plurality of frames corresponding to the devices under test, calculates a trajectory of the plurality of frames that relatively move in accordance with the operation of the polishing member, and displays the calculated trajectory of the plurality of frames on a display and input device connected to the information processing device. ### Claim 10 (depends on 1) The information processing device as claimed in claim 1, wherein the program instructions cause the processor to form a plurality of plots corresponding to the probes, calculate a trajectory of the plurality of plots that relatively move in accordance with the operation of the polishing member, and display the calculated trajectory of the plurality of plots on a display and input device connected to the information processing device. ### Claim 11 A display and input device comprising a display screen for displaying polishing content of probes configured to contact devices under test, the display and input device being configured to set the polishing content by a user's operation on the display screen, wherein the display screen includes: an area setting screen for setting a polishing area in a polishing member configured to polish the probes; a pattern setting screen for setting an operation pattern to be used during the polishing of the probes; and a simulation display screen for displaying a relative trajectory between the polishing member and the probes, the relative trajectory being calculated based on the set polishing area and the set operation pattern. ### Claim 12 A non-transitory computer-readable recording medium having stored therein a program for setting polishing content of probes configured to contact devices under test, the program causing an information processing device to perform: setting a polishing area in a polishing member configured to polish the probes; setting an operation pattern to be used during the polishing of the probes; and calculating a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern.