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US 2025/0085138 A1Published application
Scale, encoder and manufacturing method of scale
AssigneeMitutoyo Corporation
InventorKosaku Miyake
Life of this patent
Estimating the term…
Abstract
A manufacturing method of a scale includes forming a metal-containing layer on a resin layer that is provided on at least a first face of a substrate, forming an outline of a pattern on the metal-containing layer by irradiating a first laser to the metal-containing layer from a side opposite to the substrate, irradiating a second laser to a margin outside of the outline of the metal-containing layer from a side of a second face of the substrate opposite to the first face, and peeling a part of the metal-containing layer corresponding to the margin.
Claims11
A manufacturing method of a scale comprising:
- forming a metal-containing layer on a resin layer that is provided on at least a first face of a substrate;
- forming an outline of a pattern on the metal-containing layer by irradiating a first laser to the metal-containing layer from a side opposite to the substrate;
- irradiating a second laser to a margin outside of the outline of the metal-containing layer from a side of a second face of the substrate opposite to the first face;
- and
- peeling a part of the metal-containing layer corresponding to the margin.
2 more elements
A scale comprising:
- an optically transparent substrate that has a resin layer on a first face thereof;
- and
- a plurality of conductor patterns that are provided on the resin layer and have a structure in which a plurality of metal gratings are formed at intervals,
- wherein spotted patterns are formed at intervals along two dimensional directions on a region of the resin layer other than the conductor patterns.
1 more element
Dependencies are inferred from the claim text.