Thinner composition and method for substrate processing

A thinner composition, comprising:

• a solvent (A);
• and a fluorine-containing additive (B), wherein the fluorine-containing additive (B) comprises a compound represented by the following Formula (B-1), a polymer represented by the following Formula (B-2), a polymer represented by the following Formula (B-3), or a combination thereof,
• in Formula (B-1), X1 to X7 each represent hydrogen, fluorine, or a fluorine-containing alkyl group having 1 to 2 carbon atoms, and at least one of X1 to X7 is fluorine or a fluorine-containing alkyl group having 1 to 2 carbon atoms;
• in Formula (B-2), R1 and R9 each represent CyH2y-3Oz, wherein y represents an integer of 4 to 25, and z represents an integer of 1 to 7,
• R2, R4, R5, R6, and R8 each represent hydrogen, an alkyl group having 1 to 5 carbon atoms, or an alkoxy group having 1 to 5 carbon atoms,
• R3 and R7 each represent CnH2n-2, wherein n represents an integer of 4 to 25,
• X8 represents a fluorine-containing alkyl group having 1 to 3 carbon atoms,
• m represents an integer of 2 to 39,
• in response to m being an integer greater than or equal to 3, the plurality of R5s are the same as or different from each other, and the plurality of X8s are the same as or different from each other;
• in Formula (B-3), X9 and X10 each represent CrF2r-1, wherein r represents an integer of 2 to 15,
• R10 to R13 each represent hydrogen, an alkyl group having 1 to 3 carbon atoms, an alkoxy group having 1 to 3 carbon atoms, or a hydroxyl group,
• T represents hydrogen, an alkyl group having 1 to 3 carbon atoms, an alkoxy group having 1 to 3 carbon atoms, a hydroxyl group, a carboxyl group, *—COOCH3, *—COOC2H5, an aldehyde group, an amine group, *—OSO3H, *—OSO3NH4, *—OSO3Na, *—OSO3K, wherein * represents a bonding position,
• j and q each represent an integer of 2 to 30,
• k represents an integer of 0 to 20,
• p represents an integer of 1 to 9,
• in response to j, k, p, and q each being an integer greater than or equal to 2, the plurality of R11s are the same as or different from each other, the plurality of R12s are the same as or different from each other, the plurality of R13s are the same as or different from each other, and the plurality of X10s are the same as or different from each other.