# US 2025/0084113 A1 · Nitrosyl precursors and related methods

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2025/0084113 A1
- Document ID: US20250084113A1
- Status: Published application
- Kind: A1
- Application number: 18/825,833
- Filed: 2024-09-05
- Published: 2025-03-13
- Earliest claimed: 2023-09-10
- Assignees: Entegris, Inc.
- Applicants: Entegris, Inc.
- Inventors: David M. Ermert; Philip S.H. Chen
- Web page: https://patentgrep.com/patent/US20250084113A1

## CPC

- C07F 11/005: {compounds without a metal-carbon linkage}
- C07F: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM (metal-containing porphyrins C07D487/22)

## Abstract

Precursor compositions and related methods are provided. A precursor composition comprises a precursor compound of the formula: [(L1)nM(L2)m-n]z, where: L1 is a first ligand; M is a metal; L2 is a second ligand; n is 1 to 6; m is an oxidation state of M; and z is 1 or 2. A purity of the precursor compound in the composition is at least 99.5%. Methods for forming films and methods for making precursor compositions are provided.

## Claims

### Claim 1

A composition comprising:
a precursor compound of the formula:
[(L1)nM(L2)m-n]z,
where:
L1 is a first ligand;
M is a metal;
L2 is a second ligand;
n is 1 to 6;
m is an oxidation state of M; and
z is 1 or 2;
wherein a purity of the precursor compound in the composition is at least 99.5%.

### Claim 2 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 1;
M is Mo or W;
L1 is a cyclopentadienyl ligand; and
L2 are each independently a hydrogen, an alkyl, a nitrosyl, a carbonyl, or a halide.

### Claim 3 (depends on 2)

The composition of claim 2, wherein the cyclopentadienyl ligand is a ligand of the formula:
where:
R are each independently a hydrogen or a C1-C6 alkyl.

### Claim 4 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 1;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is (CO)2NO.

### Claim 5 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 5;
z is 1;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)4 is (CO)3R2, where R2 is a hydrogen, a methyl, an ethyl, an n-propyl, or an isopropyl.

### Claim 6 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 1;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is NO(X)2, where X is a halide.

### Claim 7 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 1;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is R2(X)2, where R2 is a hydrogen, a methyl, an ethyl, an n-propyl, or an isopropyl.

### Claim 8 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 2;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is NO(X)2, where X is a halide.

### Claim 9 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 2;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is R2(X)2, where R2 is a hydrogen, a methyl, an ethyl, an n-propyl, or an isopropyl.

### Claim 10 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 2 or greater;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is NO(R′)2, where R′ are each independently a hydrogen, a C1-C5 alkyl, an amine, or an alkoxide.

### Claim 11 (depends on 10)

The composition of claim 10, wherein (R′)2 is (H)2.

### Claim 12 (depends on 10)

The composition of claim 10, wherein (R′)2 is (N(CH3)2)2.

### Claim 13 (depends on 10)

The composition of claim 10, wherein (R′)2 is (OCH3)2.

### Claim 14 (depends on 1)

The composition of claim 1,
wherein:
n is 1;
m is 4;
z is 2 or greater;
M is Mo or W;
L1 is an unsubstituted cyclopentadienyl ligand, or a cyclopentadienyl ligand substituted with at least one of a methyl, an ethyl, an n-propyl, or an iso-propyl; and
(L2)3 is R2(R′)2, where R′ are each independently a hydrogen, a C1-C5 alkyl, an amine, or an alkoxide; and where R2 is a hydrogen, a methyl, an ethyl, an n-propyl, or an isopropyl.

### Claim 15 (depends on 14)

The composition of claim 14, wherein (R′)2 is (H)2.

### Claim 16 (depends on 14)

The composition of claim 14, wherein (R′)2 is (N(CH3)2)2.

### Claim 17 (depends on 14)

The composition of claim 14, wherein (R′)2 is (OCH3)2.

### Claim 18 (depends on 1)

The composition of claim 1, wherein the purity of the precursor compound in the composition is at least 99.8%.

### Claim 19 (depends on 1)

The composition of claim 1, wherein the composition comprises less than 0.2% by weight of impurities based on a total weight of the composition.

### Claim 20 (depends on 19)

The composition of claim 19, wherein the impurities comprise at least one of a carbon-containing compound, a reaction byproduct, or any combination thereof.