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US 2025/0083402 A1Published application
Method and device for applying a material to a support
AssigneeCarl Zeiss Jena GmbH
InventorsAndreas Lütz, Alexander Pesch, Daniel Thomae, Mirko Riethmüller
Life of this patent
Estimating the term…
Abstract
Methods and apparatuses for mounting a material (1) on a carrier (6) are provided. To this end, the material is arranged on a porous layer (2) of an air bearing arrangement (2, 3).
Claims21
1-26. (canceled)
An apparatus, comprising:
- an air bearing arrangement comprising a porous layer on an air bearing, the porous layer comprising a surface configured to receive a material;
- and
- a pump configured to apply overpressure and/or negative pressure to the air bearing.
Dependencies are inferred from the claim text.