# US 2025/0083331 A1 · Substrate holding hand and substrate conveyor robot > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0083331 A1 - Document ID: US20250083331A1 - Status: Published application - Kind: A1 - Application number: 18/729,801 - Filed: 2022-12-21 - Published: 2025-03-13 - Earliest claimed: 2022-01-25 - Assignees: Kawasaki Jukogyo Kabushiki Kaisha - Applicants: Kawasaki Jukogyo Kabushiki Kaisha - Inventors: Shinya KINOSHITA - Web page: https://patentgrep.com/patent/US20250083331A1 ## CPC - B25J 11/0095: {Manipulators transporting wafers} - B25J 15/00: Gripping heads {and other end effectors (grippers used in machine tools B23Q7/04; gripping members fitted on cranes B66C1/42, B66C1/44; gripping means used for mounting electrical components H05K13/04; gripping means used in the manufacture of semiconductors H10P72/7602)} - B25J 15/0014: {having fork, comb or plate shaped means for engaging the lower surface on a object to be transported} - B65G 49/07: for semiconductor wafers {Not used, see H10P72/00}(specially adapted for conveying of semiconductor wafers during manufacture or treatment of semiconductor or electric solid state devices or components H10P72/00) - H10P 72/30: for conveying, e.g. between different workstations - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3402: {Mechanical parts of transfer devices} - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A substrate-holding hand includes a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other; and a support mechanism for supporting the plurality of blades. Each of the plurality of blades is connected to the support mechanism by an eccentric element. ## Claims ### Claim 1 A substrate-holding hand comprising: a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other; and a support mechanism for supporting the plurality of blades, wherein each of the plurality of blades is connected to the support mechanism by an eccentric element. ### Claim 2 (depends on 1) The substrate-holding hand according to claim 1, wherein the support mechanism includes a linkage for changing a pitch between the blades; the linkage includes a plurality of links; and each of the plurality of blades is connected to corresponding one of the plurality of links by the eccentric element. ### Claim 3 (depends on 2) The substrate-holding hand according to claim 2, wherein the blade includes a hole; the eccentric element includes an eccentric bolt including a shaft and a flange eccentrically arranged from a rotation center axis of the shaft, the eccentric bolt being inserted in the hole; and fine adjustment of a height position of each of the plurality of blades is performed by moving the blade in an upward/downward direction by rotating the eccentric bolt inserted in the hole with the flange being in contact with an interior side surface of the hole. ### Claim 4 (depends on 3) The substrate-holding hand according to claim 3, wherein the eccentric bolt includes an end part with which a nut is threadedly engaged; and the eccentric bolt serves both as an element for fine adjustment of the height position of each of the plurality of blades in an upward/downward direction, and an element for fastening the blade to corresponding one of the plurality of links. ### Claim 5 (depends on 2) The substrate-holding hand according to claim 2 further comprising a driver for driving the linkage, wherein the plurality of links include a first link connected to the driver, and a plurality of second links connected to the plurality of blades; and each of the plurality of blades is connected to corresponding one of the plurality of second links by the eccentric element. ### Claim 6 (depends on 5) The substrate-holding hand according to claim 5, wherein the plurality of links further includes a third link connecting the plurality of second links to each other. ### Claim 7 (depends on 2) The substrate-holding hand according to claim 2 comprising a first substrate-holding hand, and a second substrate-holding hand arranged on or above the first substrate-holding hand for operating independently of the first substrate-holding hand, wherein the blades include a first blade provided to the first substrate-holding hand and fixed to the first substrate-holding hand, and a plurality of second blades provided to the second substrate-holding hand forming the pitch between the blades to be changed by the linkage. ### Claim 8 (depends on 2) The substrate-holding hand according to claim 2, wherein each of the plurality of blades includes a blade body for holding the substrate, a support supporting the blade body, and a connection part connecting the support to corresponding one of the plurality of links; and the connection part of each of the plurality of blades is connected to corresponding one of the plurality of links by the eccentric element. ### Claim 9 A substrate-conveying robot comprising: a robot arm; and a substrate-holding hand arranged in a distal end part of the robot arm, wherein the substrate-holding hand includes a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other, and a support mechanism for supporting the plurality of blades, and each of the plurality of blades is connected to the support mechanism by an eccentric element.