# US 2025/0083269 A1 · Workpiece support > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2025/0083269 A1 - Document ID: US20250083269A1 - Status: Published application - Kind: A1 - Application number: 18/830,197 - Filed: 2024-09-10 - Published: 2025-03-13 - Earliest claimed: 2023-09-11 - Assignees: Disco Corporation - Applicants: Disco Corporation - Inventors: Karl Heinz PRIEWASSER; Eugene EURICH - Web page: https://patentgrep.com/patent/US20250083269A1 ## CPC - B23Q 1/03: Stationary work or tool supports (B23Q1/70 takes precedence; auxiliary tables B23Q1/74; tailstocks B23B23/00) - H10P 72/74: {using temporarily an auxiliary support} - H10P 72/18: {characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports} - H10P 72/7448: {the bond interface between the auxiliary support and the wafer comprising two or more, e.g. multilayer adhesive or adhesive and release layer} - H10P 72/745: {the bond interface between the auxiliary support and the wafer comprises three or more layers} - H10P 72/70: for supporting or gripping - H10P 72/7416: {used during dicing or grinding} - B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines B23B27/00); MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract The present disclosure describes a method of providing a workpiece support unit for supporting a workpiece. The method comprises the steps of providing a carrier having a first side and a second side opposite to the first side, providing a protective sheeting, and providing an intermediate layer. The method also comprises the step of arranging the protective sheeting and the intermediate layer on the first side of the carrier by at least partially interposing the intermediate layer between the protective sheeting and the carrier so that an attachment force between said protective sheeting and said carrier is greater in a peripheral region of the first side of the carrier than in a center region of the first side of the carrier. The disclosure also proposes a workpiece support unit. ## Claims ### Claim 1 A method of providing a workpiece support unit for supporting a workpiece, the method comprising: providing a carrier having a first side and a second side opposite to the first side; providing a protective sheeting; providing an intermediate layer; and arranging the protective sheeting and the intermediate layer on the first side of the carrier by at least partially interposing the intermediate layer between the protective sheeting and the carrier so that an attachment force between said protective sheeting and said carrier is greater in a peripheral region of the first side of the carrier than in a center region of the first side of the carrier. ### Claim 2 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the intermediate layer is arranged in the center region of the first side of the carrier, and/or wherein the intermediate layer is arranged in contact with said carrier and/or with said protective sheeting. ### Claim 3 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the intermediate layer is formed of a material different from a material of the protective sheeting. ### Claim 4 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the intermediate layer is a sheet material, in particular a polyimide film or a polyethylene terephthalate (PET) film. ### Claim 5 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the intermediate layer is applied by coating the protective sheeting and/or the carrier. ### Claim 6 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the protective sheeting is arranged in contact with the peripheral region of the first side of the carrier. ### Claim 7 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the protective sheeting includes a protective layer, said protective layer preferably being arranged in contact with the peripheral region of the first side of the carrier, and wherein the protective layer is preferably a polyolefin film. ### Claim 8 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the protective sheeting includes one or more additional layers, wherein the one or more additional layers may be an adhesive layer, a cushioning layer and/or a base sheet. ### Claim 9 (depends on 1) The method of providing a workpiece support unit according to claim 1, the method further comprising: providing one or more additional intermediate layers; and interposing the one or more additional intermediate layers at least partially between the intermediate layer and the protective sheeting, wherein the one or more additional intermediate layers may be an adhesive and/or a cushioning layer and/or a base sheet. ### Claim 10 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the protective sheeting includes an adhesive arranged on a side for facing the workpiece and/or on a side for facing the carrier, wherein the adhesive is preferably provided on a circumferential portion of the respective sides. ### Claim 11 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the carrier includes a carrier substrate having a first side facing the protective sheeting and the intermediate layer, and a second side opposite to the first side, wherein the carrier preferably further includes an adhesive, the adhesive being preferably arranged on the first side of the carrier substrate, in particular in a peripheral region of the first side of the carrier substrate. ### Claim 12 (depends on 1) The method of providing a workpiece support unit according to claim 1, wherein the carrier further includes at least one additional protective sheeting. ### Claim 13 (depends on 12) The method of providing a workpiece support unit according to claim 12, wherein the at least one additional protective sheeting is arranged on the first side of the carrier, and/or wherein the at least one additional protective sheeting is arranged on the second side of the carrier. ### Claim 14 (depends on 12) The method of providing a workpiece support unit according to claim 12, wherein the at least one additional protective sheeting comprises a protective layer, in particular a protective film. ### Claim 15 (depends on 11) The method of providing a workpiece support unit according to claim 11, wherein, after arranging the protective sheeting on the first side of the carrier, the protective sheeting and the at least one additional protective sheeting contact each other around the carrier substrate. ### Claim 16 A method of preparing a workpiece for processing, the method comprising: providing a workpiece having a front side and a back side; providing a protective sheeting and an intermediate layer; arranging the protective sheeting on the front side or the back side of the workpiece; arranging the intermediate layer on the protective sheeting so that the intermediate layer and the protective sheeting form a face side, the face side being configured for mounting a first side of a carrier thereon and is further configured for providing an attachment force for said carrier that is greater in a peripheral region of the first side of the carrier than in a center region of the first side of the carrier. ### Claim 17 A method of processing a workpiece, the method comprising: providing a workpiece support unit for supporting the workpiece according to any one of the preceding claims; arranging the workpiece on the protective sheeting on a side opposite to a side facing the carrier and the intermediate layer; and processing the workpiece. ### Claim 18 A workpiece support unit for supporting a workpiece, comprising: a carrier having a first side and a second side opposite to the first side; a protective sheeting; and an intermediate layer; wherein the protective sheeting and the intermediate layer are arranged on the first side of the carrier, wherein the intermediate layer is at least partially interposed between the protective sheeting and the carrier so that an attachment force between said protective sheeting and said carrier is greater in a peripheral region of the first side of the carrier than in a center region of the first side of the carrier. ### Claim 19 (depends on 18) The workpiece support unit according to claim 18, wherein the carrier further includes at least one additional protective sheeting. ### Claim 20 (depends on 19) The workpiece support unit according to claim 19, wherein the at least one additional protective sheeting is arranged on the first side of the carrier, and/or wherein the at least one additional protective sheeting is arranged on the second side of the carrier. ### Claim 21 (depends on 19) The workpiece support unit according to claim 19, wherein the at least one additional protective sheeting comprises a protective layer, in particular a polyolefin film. ### Claim 22 (depends on 19) The workpiece support unit according to claim 19, wherein the protective sheeting and the at least one additional protective sheeting are in contact with each other, wherein the protective sheeting and the at least one additional protective sheeting are in contact with each other around the carrier substrate.