# US 2025/0083144 A1 · Biochip and manufacturing method thereof

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- Number: US 2025/0083144 A1
- Document ID: US20250083144A1
- Status: Published application
- Kind: A1
- Application number: 18/426,353
- Filed: 2024-01-30
- Published: 2025-03-13
- Earliest claimed: 2023-09-12
- Assignees: Episil Technologies Inc.
- Applicants: Episil Technologies Inc.
- Inventors: Wen Ting Hsu; De Chuan Liu; Kuo Yu Li
- Web page: https://patentgrep.com/patent/US20250083144A1

## CPC

- B01L 3/502753: {characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation}
- G01N 27/4145: {specially adapted for biomolecules, e.g. gate electrode with immobilised receptors}
- B01L 2300/0819: Microarrays; Biochips
- B01L 2300/0874: Three dimensional network
- B01L 2300/0887: Laminated structure
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A biochip includes a substrate, an insulating layer, a semiconductor layer, a dielectric layer, a metal layer, and a protective layer. The semiconductor layer is disposed on the insulating layer and has a reaction region. The dielectric layer is disposed on the semiconductor layer and has a first opening. The metal layer is disposed on the dielectric layer and includes a source, a drain, and a wall structure. The wall structure surrounds the first opening, the source, and the drain. The protective layer is disposed on the metal layer and has a flat part, a protruding part, a second opening, and a third opening. The flat part surrounds and defines the second opening. The protruding part is disposed corresponding to the wall structure, and the protruding part surrounds and defines the third opening. The second opening connects the third opening and the first opening to expose the reaction region.

## Claims

### Claim 1

A biochip, configured to detect a biological material in a solution to be tested, comprising:
a substrate;
an insulating layer, disposed on the substrate;
a semiconductor layer, disposed on the insulating layer, having a reaction region;
a dielectric layer, disposed on the semiconductor layer, having a first opening;
a metal layer, disposed on the dielectric layer, comprising:
a source and a drain, electrically connected to the semiconductor layer respectively; and
a wall structure, surrounding the first opening, the source, and the drain; and
a protective layer, disposed on the metal layer, having a flat part, a protruding part, a second opening, and a third opening;
wherein the flat part surrounds and defines the second opening, the protruding part is disposed corresponding to the wall structure, and the protruding part surrounds and defines the third opening,
wherein the second opening connects the third opening and the first opening to expose the reaction region.

### Claim 2 (depends on 1)

The biochip according to claim 1, wherein the source, the drain, and the wall structure are separated from each other, and the source and the drain are electrically insulated from the wall structure.

### Claim 3 (depends on 1)

The biochip according to claim 1, wherein in a three-dimensional view of the biochip, the wall structure does not completely surround the first opening.

### Claim 4 (depends on 1)

The biochip according to claim 1, wherein in a three-dimensional view of the biochip, the wall structure completely surrounds the first opening.

### Claim 5 (depends on 1)

The biochip according to claim 1, wherein a minimum distance between the wall structure and the source is 0.1 micrometers to 5 micrometers.

### Claim 6 (depends on 1)

The biochip according to claim 1, wherein in a three-dimensional view of the biochip, the third opening is larger than the second opening.

### Claim 7 (depends on 1)

The biochip according to claim 1, wherein the protruding part completely surrounds the first opening and the second opening.

### Claim 8 (depends on 1)

The biochip according to claim 1, wherein the solution to be tested is disposed in the first opening, and an upper surface of the solution to be tested is between an upper surface of the protruding part and an upper surface of the flat part.

### Claim 9 (depends on 1)

The biochip according to claim 1, wherein the metal layer further comprises a source extension pad and a drain extension pad, and the biochip further comprises:
a first transfer pad and a second transfer pad, disposed on the insulating layer respectively,
wherein the source is electrically connected to the source extension pad through the first transfer pad, and the drain is electrically connected to the drain extension pad through the second transfer pad.

### Claim 10

A manufacturing method of a biochip, wherein the biochip is configured to detect a biological material in a solution to be tested, and the manufacturing method comprises:
providing a substrate;
forming an insulating layer on the substrate;
forming a semiconductor layer on the insulating layer, wherein the semiconductor layer has a reaction region;
forming a dielectric layer on the semiconductor layer, wherein the dielectric layer has a first opening;
forming a metal layer on the dielectric layer, wherein the metal layer comprises:
a source and a drain, electrically connected to the semiconductor layer respectively; and
a wall structure, surrounding the first opening, the source, and the drain; and
forming a protective layer on the metal layer, wherein the protective layer has a flat part, a protruding part, a second opening, and a third opening;
wherein the flat part surrounds and defines the second opening, the protruding part is disposed corresponding to the wall structure, and the protruding part surrounds and defines the third opening,
wherein the second opening connects the third opening and the first opening to expose the reaction region.