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AssigneeKokusai Electric Corporation
InventorShinichiro MORI
Estimating the term…
There is provided a technique capable of easily identifying information related to a valid setting item used in a substrate processing apparatus when performing a file editing in a display processing apparatus. There is provided a technique that includes: a memory configured to store a file containing a plurality of items for each of a plurality of categories, setting values for each of the plurality of items and validity information indicating whether the setting values for each of the plurality of items are valid, wherein process conditions for a substrate are classified into the plurality of categories; a display configured to display the validity information and the setting values for each of the plurality of items classified for each of the plurality of categories on a screen for each of the categories; and a manipulator configured to perform an edit operation on the validity information displayed on the screen.
A display processing apparatus comprising:
A display method comprising
A non-transitory computer-readable recording medium storing a program that causes a substrate processing apparatus, by a computer, to perform:
Dependencies are inferred from the claim text.