Fiber optic power for adjustable magnet assemblies
AssigneeCardinal CG Company
InventorKyle R. Thering
Life of this patent
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Abstract
An apparatus, system and method for adjustable magnet assemblies that deliver power through fiber optics. An energy storage device that includes a rechargeable battery is located in a magnetron assembly and a fiber optic cable located outside the magnetron assembly delivers power signals to recharge the rechargeable battery.
Claims24
A magnetron assembly for a rotary target, the magnetron assembly comprising:
- a plurality of magnets;
- a plurality of motors operatively coupled to the plurality of magnets, the plurality of motors configured to adjust positions of the plurality of magnets;
- a controller and energy storage device in operative communication with the plurality of motors, the controller and energy storage device including an electronic controller and at least one rechargeable battery;
- and
- a fiber optic cable operatively coupled to the controller and energy storage device such that photon signals received by the fiber optic cable from outside the magnetron assembly are converted to electrical signals and delivered to the controller and energy storage device wherein the electrical signals include power signals to recharge the rechargeable battery.
A method for displacing at least one of a plurality of magnets located in a magnetron assembly for sputtering, the magnetron assembly comprising a plurality of motors operatively coupled to the plurality of magnets, the plurality of motors configured to adjust positions of the plurality of magnets, a controller and energy storage device in operative communication with the plurality of motors, the controller and energy storage device including an electronic controller and at least one rechargeable battery, a fiber optic cable operatively coupled with the controller and energy storage device, the method comprising the steps of:
- delivering photon signals from outside the magnetron to the fiber optic cable assembly and converting the photon signals to electrical signals delivered to the controller and energy storage device, wherein the photon signals include power signals;
- and
- recharging the rechargeable battery of the controller and energy storage device with the power signals.
Dependencies are inferred from the claim text.