Information processing apparatus, information processing method, and semiconductor manufacturing system

An information processing method comprising:

• providing an information processing apparatus configured to execute a simulation of a process state, which is being executed in a semiconductor manufacturing apparatus, using a physical model of the semiconductor manufacturing apparatus,
• executing the simulation by setting operating conditions of the physical model to same conditions as those of the semiconductor manufacturing apparatus;
• changing a physical coefficient of the physical model such that an output value of the physical model approximates to a corresponding output value of the semiconductor manufacturing apparatus;
• analyzing a deterioration state of the semiconductor manufacturing apparatus based on a change in the physical coefficient;
• and
• outputting information regarding the deterioration state of the semiconductor manufacturing apparatus analyzed in the analyzing.

A semiconductor manufacturing system comprising:

• a semiconductor manufacturing apparatus;
• and
• an information processing apparatus,
• wherein the information processing device includes,
• a simulation execution circuitry configured to execute a simulation of a process state, which is being executed in a semiconductor manufacturing apparatus, using a physical model of the semiconductor manufacturing apparatus by setting operating conditions of the physical model to same conditions as those of the semiconductor manufacturing apparatus;
• a physical coefficient change circuitry configured to change a physical coefficient of the physical model such that an output value of the physical model approximates to a corresponding output value of the semiconductor manufacturing apparatus;
• a deterioration state analysis circuitry configured to analyze a deterioration state of the semiconductor manufacturing apparatus, based on a change in the physical coefficient;
• and
• a deterioration state output circuitry configured to output information regarding the deterioration state of the semiconductor manufacturing apparatus analyzed by the deterioration state analysis circuitry.